Kinetic study of silicon carbide deposited from methyltrichlorosilane precursor

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Downloaded from https://www.cambridge.org/core. Queen Mary University, on 24 Mar 2018 at 14:57:24, subject to the Cambridge Core terms of use, available at https://www.cambridge.org/core/terms. https://doi.org/10.1557/JMR.1994.0104

Downloaded from https://www.cambridge.org/core. Queen Mary University, on 24 Mar 2018 at 14:57:24, subject to the Cambridge Core terms of use, available at https://www.cambridge.org/core/terms. https://doi.org/10.1557/JMR.1994.0104

Downloaded from https://www.cambridge.org/core. Queen Mary University, on 24 Mar 2018 at 14:57:24, subject to the Cambridge Core terms of use, available at https://www.cambridge.org/core/terms. https://doi.org/10.1557/JMR.1994.0104

Downloaded from https://www.cambridge.org/core. Queen Mary University, on 24 Mar 2018 at 14:57:24, subject to the Cambridge Core terms of use, available at https://www.cambridge.org/core/terms. https://doi.org/10.1557/JMR.1994.0104

Downloaded from https://www.cambridge.org/core. Queen Mary University, on 24 Mar 2018 at 14:57:24, subject to the Cambridge Core terms of use, available at https://www.cambridge.org/core/terms. https://doi.org/10.1557/JMR.1994.0104

Downloaded from https://www.cambridge.org/core. Queen Mary University, on 24 Mar 2018 at 14:57:24, subject to the Cambridge Core terms of use, available at https://www.cambridge.org/core/terms. https://doi.org/10.1557/JMR.1994.0104

Downloaded from https://www.cambridge.org/core. Queen Mary University, on 24 Mar 2018 at 14:57:24, subject to the Cambridge Core terms of use, available at https://www.cambridge.org/core/terms. https://doi.org/10.1557/JMR.1994.0104