Laser Precision Microfabrication
Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapt
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materials science
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Springer Series in
materials science Editors: R. Hull C. Jagadish R.M. Osgood, Jr. J. Parisi Z. Wang H. Warlimont The Springer Series in Materials Science covers the complete spectrum of materials physics, including fundamental principles, physical properties, materials theory and design. Recognizing the increasing importance of materials science in future device technologies, the book titles in this series ref lect the state-of-the-art in understanding and controlling the structure and properties of all important classes of materials.
Please view available titles in Springer Series in Materials Science on series homepage http://www.springer.com/series/856
Koji Sugioka Michel Meunier Alberto Piqu´e Editors
Laser Precision Microfabrication With 158 Figures
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Editors Dr. Koji Sugioka RIKEN Advanced Science Institute Laser Technology Laboratory Hirosawa 2-1 351-0198Wako-shi, Saitama, Japan E-mail: [email protected]
Professor Michel Meunier Canada Research Chair in Laser Micro/Nanoengineering of materials Laser Processing Laboratory Department of Engineering Physics École Polytechnique Montréal Montreal, QC, Canada E-mail: [email protected]
Dr. Alberto Piqué Naval Research Laboratory Overlook Ave. SW., 4555, Washington, DC 20375, USA E-mail: [email protected] Series Editors: Professor Robert Hull University of Virginia Dept. of Materials Science and Engineering Thornton Hall Charlottesville, VA 22903-2442, USA
Professor Jürgen Parisi Universität Oldenburg, Fachbereich Physik Abt. Energie- und Halbleiterforschung Carl-von-Ossietzky-Straße 9–11 26129 Oldenburg, Germany
Professor Chennupati Jagadish Australian National University Research School of Physics and Engineering J4-22, Carver Building Canberra ACT 0200, Australia
Dr. Zhiming Wang University of Arkansas Department of Physics 835 W. Dicknson St. Fayetteville, AR 72701, USA
Professor R.M. Osgood, Jr. Microelectronics Science Laboratory Department of Electrical Engineering Columbia University Seeley W. Mudd Building New York, NY 10027, USA
Professor Hans Warlimont DSL Dresden Material-Innovation GmbH Pirnaer Landstr. 176 01257 Dresden, Germany
Springer Series in Materials Science ISSN 0933-033X ISBN 978-3-642-10522-7 e-ISBN 978-3-642-10523-4 DOI 10.1007/978-3-642-10523-4 Springer Heidelberg Dordrecht London New York Library of Congress Control Number: 2010931868 c Springer-Verlag Berlin Heidelberg 2010 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, 1965, in its current version, and permission for use must always be obtained from Springer. Violations are liable to prosecution under the German Copyright Law. The use of general descriptive names, r
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