MEMS and Nanotechnology for Gas Sensors Sunipa Roy and Chandan Kumar Sarkar
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MEMS and Nanotechnology for Gas Sensors Sunipa Roy and Chandan Kumar Sarkar CRC Press, 2015 242 pages, $103.96 (e-book $90.97) ISBN 9781498700122
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asic concepts of microfabrication technology and nanocrystalline metal oxide-based gas sensors are discussed in detail in the 12 chapters of this book. It is written for research-level students in various disciplines such as physics, materials science, chemistry, and mechanical engineering. Chapter 1 starts with a detailed introduction to clean room technology and concepts. A brief history with an introduction to microelectromechanical systems (MEMS) and materials used in MEMS is discussed with appropriate illustrations. Chapter 2 covers various substrates (Si, Ge, GaAs) used for MEMS. The effects of surface contaminants as well as various cleaning and etching (e.g., wet and dry etching) processes are discussed in detail. Chapter 3 discusses various physical (thermal evaporation, sputtering, molecular epitaxy) and chemical vapor (plasmaenhanced CVD) deposition methods with diagrams showing appropriate experimental setups. Different metallization
processes are discussed briefly. Chapter 4 covers properties of photoresists and their different types, along with various photolithographic processes. Chapter 5 starts with a brief introduction to micromachining for gas sensors and talks about bulk and surface micromachining. Illustrations explaining the etching process and patterns are very useful. Chapter 6 discusses microheaters for gas sensors: types, properties, and needs. Software used and the physical properties affecting the heater properties are also discussed, accompanied by models and equations. Chapter 7 is an introduction to semiconductor gas sensors, their fundamentals, and their classification with working principles and variable parameters. Different types of gas sensors such as resistive-type and metal oxide-type are briefly discussed. Thick and thin films and various growth processes employed for gas-sensor fabrication are discussed in detail. Chapter 8 talks about graphene, including its different physical, chemical, and mechanical properties. Growth
Earth-Abundant Materials for Solar Cells: Cu2-II-IV-VI4 Semiconductors Sadao Adachi Wiley, 2015 528 pages, $185.00 (e-book $148.99) ISBN 978-1-119-05277-7
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he worldwide demand for energy may rise to 30 terawatts by 2050. To meet this demand, solar energy can contribute substantially: 120,000 terawatts come from the sun at any given time. However, materials must be developed that can efficiently
convert solar radiation to electricity, are available in large quantities, inexpensive, and safe to handle. Current technology is based on silicon, which has a solar conversion efficiency of 25%, but processing it is expensive because (1) it requires high
and characterization of graphene and its application for gas sensors are well discussed. The high-quality scanning electron microscope and transmission electron microscope images are very useful. Chapter 9 covers nanocrystalline ZnO-based microfabricated gas sens
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