MEMS-Based MHz Silicon Ultrasonic Nozzles for Production of Monodisperse Drops
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1052-DD08-07
MEMS-Based MHz Silicon Ultrasonic Nozzles for Production of Monodisperse Drops Y. L. Song1,2, Chih H. Cheng3, Ning Wang1, Shirley C. Tsai4, Yuan F. Chou3, Ching T. Lee2, and Chen S. Tsai1 1 Electrical Engineering and Computer Science, University of California, Irvine, CA, 92697 2 Electrical Engineering, National Cheng-Kung University, Tainan, Taiwan 3 Mechanical Engineering, National Taiwan University, Taipei, Taiwan 4 Chemiccal Engineering, Calfiornia State University, Long Beach, CA, 90840 ABSTRACT This paper reports production of 4.5 µm-diameter monodisperse water drops using a micro electro-mechanical system (MEMS)-based 1 MHz 3-Fourier horn ultrasonic nozzle. The required electrical drive voltage for atomization was 6.5 V at 964±1 kHz that is in good agreements with the values obtained by impedance measurement and by the three-dimensional (3-D) simulation using a commercial finite element analysis program. Such small diameter drops with geometrical standard deviation (GSD) as small as 1.2 and 90% inhale-able fine particle fraction (
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