Microstructural Evolution of Titania Sol-Gel Thin Films
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MICROSTRUCTURAL EVOLUTION OF TITANIA SOL-GEL THIN FILMS YONGAN YAN*, S. RAY CHAUDHURI, DIN-GUO CHEN, BARRY BOLKER, AND ARNAB SARKAR YTC America Inc., 550 Via Alondra, Camarillo, CA 93012 ABSTRACT Thin films of crystalline titania with different grain sizes and porosities were prepared by dip-coating on Si (100) substrates starting from a sol-gel process. Three synthesis procedures were developed and compared, using acetylacetone (acac, with HCI) and acetic acid (HOAc) as modifying agents or directly using hydrochloric acid as catalyst. The structural evolution of the films was characterized by Glazing Angle X-ray Diffraction (XRD), Spectroscopic Ellipsometry and Atomic Force Microscopy (AFM). Anatase phase was observed on all of the films calcined at 4400 C. The grain sizes and crystallinity generally increased with calcination temperature. Thin films obtained from acac- and HOAc-modified titanium sols had fine grains (50-80 nm) and less porosity (
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