Modification on Hydrophilic property for Harsh Environment

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0890-Y08-02.1

Modification on Hydrophilic property for Harsh Environment Hsin-Chang Tsai, Yu-Ru Chang and Tai-Kang Shing MEMS Research Center, Delta Electronics Inc., 252, Shang Ying Road, Kuei San, Taoyuan Hsien 333, Taiwan ABSTRACT In this research, a 1~2 um NiCo film coated by electroplating technique as protection film in high temperature environment was studied. The improvements of hydrophilic property and high temperature stability by coating NiCo film upon pure Cu plate have been characterized through experiments. In thermal stability characterization, the specimens were put into a temperature-controlled oven and applied a thermal load at 100℃, 200℃ and 300 ℃ for annealing. After thermal annealing, the hydrophilic property was characterized to confirm that NiCo film was stable in high temperature environment. The hydrophilic property was represented by the contact angle between the DI water and the surface of NiCo film. The outgasing effect of contaminated polymer was also study. The electroplated NiCo film has advantages of good hydrophilic property, high temperature stability and easy fabrication. Therefore, the NiCo film could help the development of thermal related products. INTRODUCTION Hydrophilic property is a useful material property used in many applications, such as mono-layer self-assembly or fluid transport by combining with the capillary force [1-3]. In the case of fluid transport application, it is known that the higher hydrophilic property will make higher transport efficiency. Besides, using the fluid circulation to remove heat from chip is an emergent technology in electronics cooling. In this kind of application, the Cu and Al are usually used as the structure materials due to its higher thermal conductivity and acceptable hydrophilic property. Unfortunately, the harsh operating environment would oxidize the surface of structure material and then reduce the fluid transport efficiency. So, how to protect the material surface from oxidation and maintain or even increase its hydrophilic property will become a vital issue in future. The electroplating technique was usually used to protect component from oxidation. The materials coated upon the surface of component were usually pure material such as Ni, Sn and Zn. Beside the surface protection, the electroplating technology was also used as the constructional material in micro electromechanical system applications [4-6].

0890-Y08-02.2

In this research, a NiCo film coated by electroplating technique as protection film in high temperature environment was studied.

The improvements of hydrophilic property and high

temperature stability by coating NiCo film upon pure Cu plate have been characterized through experiments. The hydrophilic property was represented by the contact angle between the DI water and the surface of NiCo film, and all of the contact angles during experiment were measured by contact angle instrument. EXPERIMENTAL The investigation of the modification on hydrophilic property of NiCo film was studied by determined the contact a