Silicon Carbide Microsystems for Harsh Environments

Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments. Technological readiness of t

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Series Editors: Stephen D. Senturia Professor of Electrical Engineering, Emeritus, Massachusetts Institute of Technology, Cambridge, Massachusetts Roger T. Howe Professor, Department of Electrical Engineering, Stanford University, Stanford, California Antonio J. Ricco Small Satellite Division, NASA Ames Research Center, Moffett Field, California

For further volumes: http://www.springer.com/series/7724

Muthu B.J. Wijesundara



Robert G. Azevedo

Silicon Carbide Microsystems for Harsh Environments

ABC

Muthu B.J. Wijesundara Automation & Robotics Research Institute The University of Texas at Arlington Arlington, Texas USA [email protected]

Robert G. Azevedo Proteus Biomedical Inc. Redwood City, California USA [email protected]

ISSN 1936-4407 ISBN 978-1-4419-7120-3 e-ISBN 978-1-4419-7121-0 DOI 10.1007/978-1-4419-7121-0 Springer New York Dordrecht Heidelberg London Library of Congress Control Number: 2011928695 c Springer Science+Business Media, LLC 2011  All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)

This book is affectionately dedicated to my beloved parents for teaching me courage and perseverance and believing in me when others doubted. -M. B. J. Wijesundara

To Miles, Ava, and Chloe. -R. G. Azevedo

Foreword

When I was approached by my good friends, Drs. Muthu Wijesundara and Robert Azevedo, to write a forward for their book, I was truly honored. Each had worked, yes even truly struggled, with me to master some part of the technology of silicon carbide in our group efforts to bring silicon carbide forward as a complete RF wireless sensor technology. From the prospective developed in my service as DARPA program manager, Mechanical Engineering Department Chair, fellow researcher and Dean of the College of Engineering, I do attest that this wonderful book will be useful to the practitioner as well as to the researcher in the field of silicon carbide. Indeed, it is required reading now in my own research laboratory for all who would work with me in the research of silicon carbide. I have worked hard for over ten years in the struggle to master silicon carbide, and I am pleased to report to the reader that this volume will certainly ease your way toward a true command of the subject. I have reviewed the volume in great detail, and I