Nanofabrication of Diamond-Like Carbon Templates for Nanoimprint Lithography
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0956-J13-04
Nanofabrication of Diamond-Like Carbon Templates for Nanoimprint Lithography L. Tao, S. Ramachandran, C. T. Nelson, L. J. Overzet, M. J. Goeckner, G. S. Lee, and W. Hu Department of Electrical Engineering, University of Texas at Dallas, Richardson, TX, 75083
ABSTRACT Diamond like carbon (DLC) films were deposited on Si and then patterned to form 40 nm features as nanoimprint templates. A plasma enhanced chemical vapor deposition (PECVD) system with CH4 precursor was used to deposit DLC films on Si and quartz substrates. Then these films were characterized using Raman spectroscopy, atomic force microscopy (AFM), nanoindentation, and contact angle measurement. By varying the RF power and pressure of the PECVD, DLC films with good uniformity, smooth surfaces (
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