Nanoporous Anodic Alumina as Template and Mask for Functional Nanostructures Fabrication
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1258-Q09-02
Nanoporous Anodic Alumina as Template and Mask for Functional Nanostructures Fabrication M. Hernández-Vélez1, 3, R. Sanz2, M. Manso1, O. Sánchez3, O. de Melo4, A. Asenjo3, I. Mínguez-Bacho1, 3 and M. Vázquez3. 1
Applied Physics Department, C-XII. Universidad Autonoma de Madrid. Unidad Asociada al ICMM-CSIC: GMNF. Campus Universitario de Cantoblanco. 28049. Madrid. Spain. 2
NANOATE. Campus Universitario de Cantoblanco. 28049. Madrid. Spain
3
Instituto de Ciencia de Materiales de Madrid. Campus Universitario de Cantoblanco. 28049. Madrid. Spain 4
Facultad de Física. Universidad de la Habana. Colina Universitaria. C. de la Habana. Cuba.
ABSTRACT Nanoporous Anodic Alumina Films (NAAF) have been used for growing a lot of nanostructure functional materials. Of particular interest is the NAAF conversion into membranes (NAAM) with different highly controlled pore diameter and distribution to be used as templates and masks to grow a wide variety of nanomaterials. This work constitutes an approach to a review of our latest results regarding the use of NAAF and NAAM as templates in which II-VI semiconductor, functional oxides, hard materials and magnetic nanowires have been grown. The growth techniques and methods used include Isothermal Close Space Sublimation (ICSS), Magnetron Sputtering, electroplating and sol-gel. Ion Beam Irradiation (IBI) combined with different NAAM as masks has been also used for Titania substrates functionalization.
INTRODUCTION The search for greater integration in microelectronic, optoelectronic and magneto-optic functional devices has give place to the development of new top–down and bottom–up strategies to fabricate low dimensional structures. Among bottom – up strategies the so called “synthesis on template techniques” have achieved a relevant role combined with self-assembly processes to fabricate a lot of nanostructures. In this sense, Nanoporous Anodic Alumina Films and Membranes (NAAF and NAAM respectively) [1] have been widely used. NAAF and NAAM are within the most attractive templates for nanoscale materials growth due to the possibility to take control on the ordering degree (up to several square micrometers), on the single 1D structure diameter (from 15 to 230 nm) and length (from tens to thousands of nanometers), and finally, on the lattice parameter of ordered arrays (between 65 and 500 nm). Taking advantage from all these qualities, in this work, we report our most recent results in the fabrication of different functional nanostructures using NAAF and NAAM as templates by mean of several methods with special emphasis in the use of Ion Beam Irradiation.
EXPERIMENT Templates and masks preparation NAAFs were obtained by the well known double anodization process described elsewhere [2]. In this work the most used anodization parameters were: an oxalic acid solution (0.3 M) as electrolyte; constant anodization voltage and temperature of 40 V and 3 oC respectively. Anodization times from 16 to 24 h were used in dependence of the thicknesses to be used later on. To obta
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