Nanotechnology for Electronic Materials and Devices
This book is designed as an introduction for graduate students, engineers, and researchers who want to understand the current status and future trends of micro- and nano-electronic materials and devices. It also serves as an essential reference
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Nanostructure Science and Technology Series Editor: David J. Lockwood, FRSC
NationalResearch Councilof Canada Ottawa, Ontario, Canada
Current volumes in this series: Alternative Lithography: Unleashing the Potentials of Nanotechnology Edited by Clivia M. Sotomayor Torres Interfacial Nanochemistry: Molecular Science and Engineering at Liquid-Liquid Interfaces Edited by Hiroshi Watarai, Norio Teramae, and Tsuguo Sawada Nanoparticles: Building Blocks for Nanotechnology Edited by Vincent Rotello Nanoscale Assembly: Chemical Techniques Edited by Wilhelm T.S. Huck Nano structured Catalysts Edited by Susannah L. Scott, Cathleen M. Crudden, and Christopher W. Jones Nanotechnology for Electronic Materials and Devices Edited by Anatoli Korkin, Jan Labanowski, Evgeni Gusev, and Serge Luryi Nanotechnology in Cataly sis, Volumes 1 and 2 Edited by Bing Zhou, Sophie Hermans , and Gabor A. Somorjai Nanotechnology in Catalysis, Volume 3 Edited by Bing Zhou, Scott Han, Robert Raja, and Gabor A. Somorjai Ordered Porous Nanostructures and Applications Edited by RalfWehrspohn Polyoxometalate Chemistry for Nano-Composite Design Edited by Toshihiro Yamase and Michael T. Pope Self-Assembled Nanostructures Jin Z. Zhang , Zhong-lin Wang, Jun Liu, Shaowei Chen, and Gang-yu Liu Self-Organized Nanoscale Materials Edited by Motonari Adachi and David J. Lockwood Semiconductor Nanocrystals: From Basic Principles to Applications Edited by Alexander L. Efros, David J. Lockwood, and Leonid Tsybesko v Surface Effects in Magnetic Nanoparticles Edited by Dino Fiorani
A Continuation Order Plan is availablefor this series. A continuationorder will bring delivery of each new volumeimmediatelyupon publication. Volumes are billed only upon actual shipment.For further informationplease contact the publisher.
Anatoli Korkin Evgeni Gusev
Jan Labanowski Serge Luryi
Editors
Nanotechnology for Electronic Materials and Devices
~ Springer
Anatoli Korkin Nano & Giga Solutions 1683 E. Spur Street Gilbert, AZ 85296 USA [email protected]
Jan Labanowski 204A Nieuwland Science Hall University of Notre Dame Notre Dame, IN 46556 USA [email protected]
Evgeni Gusev IBM T. J. Watson Research Center P.O. Box 218 Yorktown Heights, NY 10598 USA [email protected]
Serge Luryi Department of Electrical and Computer Engineering State University of New York at Stony Brook Stony Brook, NY 11794 USA [email protected]
Series Editor:
David J . Lockwood National Research Council of Canada Ottawa, Ontario Canada
Coverillustration: The fabrication procedure for nanoscale molecular-switch devices by imprint lithography. A monolayer of switchable molecules is deposited over a Pt nanowire bottom electrode made by imprint lithography. A blanket of Ti contact layer is deposited on top of the molecular layer, which also protects the molecules from damage during the fabrication process. Finally, reactive ion etching is used to remove the blanket Ti protective layer, leaving a crossbar device with the molecular monolayer sandwiched between two metal nanowires. Permission