New frontiers in thin film growth and nanomaterials
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New Frontiers in Thin Film Growth and Nanomaterials
JAGDISH NARAYAN
This article reviews recent developments in thin film growth and formation of three-dimensional epitaxial nanostructures. First, we present a unified standard model for thin film epitaxy, where singlecrystal films with small and large lattice misfits are grown by a new paradigm of domain matching epitaxy (DME). We define epitaxy as having a fixed orientation rather than the same orientation with respect to the substrate. The DME involves matching of integral multiples of lattice planes (diffracting as well as nondiffracting) between the film and the substrate, and this matching could be different in different directions. The idea of matching planes is derived from the basic fact that during thin film growth, lattice relaxation involves generation of dislocations whose Burgers vectors correspond to missing or extra planes, rather than lattice constants. In the DME framework, the conventional lattice matching epitaxy (LME) becomes a special case where matching of lattice constants results from matching of lattice planes with a relatively small misfit of less than 7 to 8 pct. In large lattice mismatch systems, we show that epitaxial growth of thin films is possible by matching of domains where integral multiples of lattice planes match across the interface. We illustrate this concept with atomic-level details in the TiN/Si(100) with 3/4 matching, the AlN/Si(100) with 4/5 matching, and the ZnO/-Al2O3(0001) with 6/7 matching of lattice planes across the film/substrate interface. By varying the domain size, which is equal to the integral multiple of lattice planes, in a periodic fashion, it is possible to accommodate additional misfit beyond the perfect domain matching. Thus, we can potentially design epitaxial growth of films with any lattice misfit on a given substrate with atomically clean surfaces as long as there is wetting or finite interatomic interaction across the interface and cores of dislocations do not overlap. In-situ X-ray diffraction studies on initial stages of growth of ZnO films on sapphire correctly identify a compressive stress and a rapid relaxation within one to two monolayers, consistent with the DME framework and the fact that the critical thickness is less than a monolayer. The DME examples ranging from the Ge-Si/Si(100) system with 49/50 matching (2 pct strain) to metal/Si systems with 1/2 matching (50 pct strain) are tabulated, strategies for growing strain-free films by engineering the misfit to be confined near the interface are presented, and the potential for epitaxial growth of films with any lattice misfit on a given substrate with atomically clean surfaces is discussed. In the second part, we discuss the formation of epitaxial nanodots/nanocrystals in crystalline matrices such as MgO and TiN. The formation Ni nanocrystals Jagdish (Jay) Narayan holds The John C.C. Fan Family Distinguished Chair Professorship and is Director of the NSF Center for Advanced Materials and Smart Structures at North Carolina State Universit
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