Optimization of Ion Assist Beam Deposition of Magnesium Oxide Template Films During Initial Nucleation and Growth
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Optimization of Ion Assist Beam Deposition of Magnesium Oxide Template Films During Initial Nucleation and Growth James R. Groves1, Robert H. Hammond2, Vladimir Matias3, Liliana Stan3, Raymond F. Depaula3, and Bruce M. Clemens1 1
Department of Materials Science and Engineering, Stanford University, Stanford CA 94305 Geballe Laboratory for Advanced Materials, Stanford University, Stanford CA 94305 3 Superconductivity Technology Center, Los Alamos National Laboratory, Los Alamos, NM 87545 2
ABSTRACT Recent efforts in investigating the mechanism of ion beam assisted deposition (IBAD) of biaxially textured thin films of magnesium oxide (MgO) template layers have shown that the texture develops suddenly during the initial 2 nm of deposition. To help understand and tune the behavior during this initial stage, we pre-deposited thin layers of MgO with no ion assist prior to IBAD growth of MgO. We found that biaxial texture develops for pre-deposited thicknesses < 2 nm, and that the thinnest layer tested, at 1 nm, resulted in the best qualitative RHEED image, indicative of good biaxial texture development. The texture developed during IBAD growth on the 1.5 nm pre-deposited layer is slightly worse and IBAD growth on the 2 nm pre-deposited layer produces a fiber texture. Application of these layers on an Al2O3 starting surface, which has been shown to impede texture development, improves the overall quality of the IBAD MgO and has some of the characteristics of a biaxially texture RHEED pattern. It is suggested that the use of thin (
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