Opto-nanomechanical test instrument in mechanical characterization of DLC coated MEMS devices
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TECHNICAL PAPER
Opto-nanomechanical test instrument in mechanical characterization of DLC coated MEMS devices Antanas Daugela1 • Jurgis Daugela1,2 Received: 17 December 2019 / Accepted: 29 February 2020 Ó Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract Nanomechanical test instruments can precisely measure force and displacement and produce repeatable load-unload curves that can be used in characterizing mechanical behaviour at the nanoscale. In this study, a newly developed translucent nanomechanical test instrument was used in deriving reproducible stiffness values for ultra nano crystalline diamond (UNCD)-made atomic force microscope (AFM) cantilevers that are used for mechanical properties characterization of DLC films. The instrument which is calibrated according to the ISO-14577 standard is integrated with nano/micropositioners and multi-view optical microscopes to facilitate precise manipulation of those AFM cantilevers that were dozens of micrometers in size. Experimental results on UNCD-made AFM cantilever stiffness measurements are provided and compared with theoretical and batch production values.
1 Introduction Advances in nanotechnology and all derived products would be impossible without nanoscale metrology instruments, specifically AFM and nanomechanical test instruments. While AFMs are providing surface topography measurements with sub-nanometer resolution, nanoindentors measure critical mechanical properties such as nanohardness and elastic modulus derived at as low as several nanometer depth levels. Material scientists/engineers use the surface topography and material properties data in the designing and optimizing of many products today. For example, coatings on contact lenses, glasses, and nanofiber based modern clothes were designed with the help of those instruments. Modern automotive, pharmaceutical, biomedical R&D and manufacturing control strongly depend on nanomechanical test results. The main difference between an AFM and a nanoindenter is that a nanoindenter can be modelled by a single degree of freedom mechanical system eliminating uncertainties of the probing stylus geometry. A retrospective & Antanas Daugela [email protected] 1
Nanometronix LLC, 7400 Bush Lake Drive, Bloomington, MN, USA
2
St. Thomas Academy, 949 Mendota Heights Road, Mendota Heights, MN, USA
view on nanomechanical test instrument design (Daugela 2019) brings us to the classical nanoindenter configuration that consists of a voice coil actuator and three-plate capacitive sensor where the center plate hangs on a precision low stiffness suspension (Pethica et al. 1983). A capacitive sensing and actuation is another popular design alternative that minimizes temperature drift but operates below a 50 mN load (Bushan 1999). A piezo actuator and multiple capacitive sensor configuration is a popular design for instruments that can be operated at higher (up to 10 N) loads and still have 1 nm displacement with * 5 lN force resolutions. The configur
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