Performance Study of Flexible Capacitive Pressure Sensor Based on Dielectric Structures
In recent years, with the emergence of the flexible electronic devices for artificial skin, wearable electronics, robotics, etc., more and more attention has been paid to the flexible force sensor. In this study, we designed and fabricated a flexible capa
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Abstract In recent years, with the emergence of the flexible electronic devices for artificial skin, wearable electronics, robotics, etc., more and more attention has been paid to the flexible force sensor. In this study, we designed and fabricated a flexible capacitive pressure sensor with unique washer structure and dielectric layer microstructure. The sensor consists of the flexible substrate, main dielectric and the electrode materials, using polyethylene terephthalate (PET) film, the air and the silver nanoparticles (AgNPs), respectively. Then, we systematically investigated the effect of the thickness of the washer and dielectric layer microstructure on the performance of the flexible capacitive pressure sensor. It shows that the thinner the thickness of the washer, the better the sensitivity of the sensor. However, it might lead to the degraded performance in terms of the repeatability and the stability. Besides, the dielectric layer microstructure has also a significant effect on the performance of the sensor. Furthermore, the sensitivity of the single-layer microstructure sensor is superior to those of the double-layer microstructure and no-microstructures. In respect of the stability and the repeatability of the sensor, double-layer microstructure sensor is best, followed by the single-layer microstructure and the no-microstructure. In summary, the highest sensitivity of the sensor we fabricated is 0.17 kPa−1, and the minimum detectable pressure is several pF. It has a large dynamic range and stable performance. Thus, our sensor can be widely used in many applications in the emerging fields of medical testing equipment and robotics. Keywords Flexible pressure sensor
Capacitive Thin-film Microstructure
Q. Hou M. Liang R. Liu W. Wang (&) Beijing Engineering Research Center of Printed Electronics, Beijing Institute of Graphic Communication, Beijing, China e-mail: [email protected] © Springer Nature Singapore Pte Ltd. 2017 P. Zhao et al. (eds.), Advanced Graphic Communications and Media Technologies, Lecture Notes in Electrical Engineering 417, DOI 10.1007/978-981-10-3530-2_65
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1 Introduction With the emergence of the wearable devices for robotics [1], artificial skin [2], health monitoring devices [3] and flexible displays [4], there is an increasing demand for flexible thin film sensors [5]. Flexible capacitive pressure sensor is one of the most useful flexible sensors and there are many studies on its design, material, fabrication, and performance analysis. Ting Zhang [6] et al., in Suzhou Nano Institute, Chinese Academy of Sciences, fabricated a highly-sensitive sensor, with 0.6 Pa of the minimum detection limit, by transferring silk microstructures to the sensor electrode. Zhenan Bao et al., in Stanford University [7] designed the microstructure cilia on the sensor surface, greatly improving the sensitivity and resolution of the device. Lee et al., in University of Michigan [8] fabricated the sensor with the sensitivity up to 0.03 mN−1, the response time less than 160 ms
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