Piezoresistance Gauge Factors in Heavily Boron-Doped Polysilicon from Infrared Piezoreflectance
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PIEZORESISTANCE GAUGE FACTORS IN HEAVILY BORON-DOPED POLYSILICON FROM INFRARED PIEZOREFLECTANCE J. CALI*, E. BUSTARRET*, P. KLEIMANN**, M. LE BERRE**, D. BARBIER** *LEPES-CNRS, 25 av. des Martyrs, BP 166, F-38042 Grenoble Cedex 9, France. **LPM-INSA, 20 av. Albert Einstein, 69621 Villeurbanne Cedex ABSTRACT Heavily boron-doped (4x1O' 9 < [B]
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