Plasmonic Metal-Hybrid Hydrogen Sensor Based on Semiconductor Nanocrystal Micro Ring

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MRS Advances © 2017 Materials Research Society DOI: 10.1557/adv.2017.624

Plasmonic Metal-Hybrid Hydrogen Sensor Based on Semiconductor Nanocrystal Micro Ring Da Chuan Wu1, Wei Guo1, Poonam Birar1, and Ya Sha Yi1,2,* 1

Integrated Nano Optoelectronics Laboratory, University of Michigan, Dearborn, MI 48128, USA

2

Energy Institute, University of Michigan, Ann Arbor, MI 48109, USA

*[email protected]

ABSTRACT

We have proposed and demonstrated numerically an ultra-small (4×4 ) hydrogen sensor based on micro ring resonator. With a palladium or platinum layer coated on the inner surface of the micro ring resonator, the device is highly sensitive to the low hydrogen concentration variation and the sensitivity is at least one magnitude order larger than the optical fiber-based hydrogen sensor. We have also investigated the tradeoff between the portion coverage of palladium/platinum layer and the sensitivity. The width of the hydrogen sensitive layer is also studied and the minimum feature width is determined to be the length of the ring waveguide evanescent wave. This ultra-small optical hydrogen sensor will be promising to realize highly compact sensor with integration capability for applications on hydrogen fuel economy.

INTRODUCTION Because of the superior performance of hydrogen as one of the most promising fuels in the future, it has drawn the attention of the scientific community all over the world for decades. Hydrogen is an invisible, flammable, odorless and highly explosive gas. Therefore, the hydrogen sensor has very different characteristics from the conventional gas detector. Currently, hydrogen sensors are widely utilized in solid oxide fuel cells, hydrogen transportation, hydrogen storage and other applications [1], [2]. In this work, we proposed an on-chip silicon-based optical micro ring resonator hydrogen sensor that could overcome many of the disadvantages of current sensors. It is ultra-small, easy to integrate, and highly sensitive. In addition, hydrogen-sensitive materials as Pd and Pt have good adhesion to silicon ring resonators. This ultra-small optical sensor is environment-friendly and can work in harsh and flammable environments. Both Palladium (Pd) and platinum (Pt)are suitable for sensing hydrogen because they can react with hydrogen and form Pd/Pt hydride. They have the characteristics of sensitivity, selectivity and specificity to hydrogen, which is another reason for widely using in hydrogen sensors.

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We have demonstrated numerically a novel hydrogen sensor based on micro ring resonator with low hydrogen concentration detection capability (0∼4%) and ultrasmall size (4x4 ), as illustrated in Figure 1, with hydrogen sensitive Pd or Pt layer integrated within the inner layer of the micro ring resonator. We have compared the performance