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1249-F06-03

Potential of the Ultra-thin Layer Fabricated by Wet-process as a Pore-Seal for Porous Low-k Films Shoko Sugiyama Ono1, Kazuo Kohmura1, Hirofumi Tanaka1, Kentaro Nakayama1, Akifumi Kagayama1, Toshihiko Tsuchiya2, Makoto Nakaura2, Osamu Matsuoka1, Toshihiko Takaki1, Kou Maekawa1 1 R&D Center, Mitsui Chemicals, Inc., 580-32, Nagaura, Sodegaura, Chiba, 299-0265, Japan 2 Analysis Research Lab., Mitsui Chemical Analysis & Consulting Service Inc. 580-32, Nagaura, Sodegaura, Chiba, 299-0265, Japan ABSTRACT We succeeded in fabricating ultra-thin (

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