Precision Nanometrology Sensors and Measuring Systems for Nanomanufa
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of
- PDF / 20,984,901 Bytes
- 358 Pages / 439.37 x 666.142 pts Page_size
- 111 Downloads / 218 Views
Series Editor Professor D.T. Pham Manufacturing Engineering Centre Cardiff University Queen’s Building Newport Road Cardiff CF24 3AA UK Other titles in this series Assembly Line Design B. Rekiek and A. Delchambre Advances in Design H.A. ElMaraghy and W.H. ElMaraghy (Eds.) Effective Resource Management in Manufacturing Systems: Optimization Algorithms in Production Planning M. Caramia and P. Dell’Olmo Condition Monitoring and Control for Intelligent Manufacturing L. Wang and R.X. Gao (Eds.) Optimal Production Planning for PCB Assembly W. Ho and P. Ji Trends in Supply Chain Design and Management: Technologies and Methodologies H. Jung, F.F. Chen and B. Jeong (Eds.)
Frontiers in Computing Technologies for Manufacturing Applications Y. Shimizu, Z. Zhang and R. Batres Automated Nanohandling by Microrobots S. Fatikow A Distributed Coordination Approach to Reconfigurable Process Control N.N. Chokshi and D.C. McFarlane ERP Systems and Organisational Change B. Grabot, A. Mayère and I. Bazet (Eds.) ANEMONA V. Botti and A. Giret Theory and Design of CNC Systems S.-H. Suh, S.-K. Kang, D.H. Chung and I. Stroud Machining Dynamics K. Cheng
Process Planning and Scheduling for Distributed Manufacturing L. Wang and W. Shen (Eds.)
Changeable and Reconfigurable Manufacturing Systems H.A. ElMaraghy
Collaborative Product Design and Manufacturing Methodologies and Applications W.D. Li, S.K. Ong, A.Y.C. Nee and C. McMahon (Eds.)
Advanced Design and Manufacturing Based on STEP X. Xu and A.Y.C. Nee (Eds.)
Decision Making in the Manufacturing Environment R. Venkata Rao Reverse Engineering: An Industrial Perspective V. Raja and K.J. Fernandes (Eds.)
Artificial Intelligence Techniques for Networked Manufacturing Enterprises Management L. Benyoucef, B. Grabot (Eds.)
Wei Gao
Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing
123
Wei Gao, PhD Tohoku University School of Engineering Department of Nanomechanics Aramaki Aza Aoba 6-6-01 980-8579 Aoba-ku Sendai Japan [email protected]
ISSN 1860-5168 ISBN 978-1-84996-253-7 e-ISBN 978-1-84996-254-4 DOI 10.1007/978-1-84996-254-4 Springer London Dordrecht Heidelberg New York British Library Cataloguing in Publication Data A catalogue record for this book is available from the British Library Library of Congress Control Number: 2010929852 © Springer-Verlag London Limited 2010 Apart from any fair dealing for the purposes of research or private study, or criticism or review, as permitted under the Copyright, Designs and Patents Act 1988, this publication may only be reproduced, stored or transmitted, in any form or by any means, with the prior permission in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms of licences issued by the Copyright Licensing Agency. Enquiries concerning reproduction outside those terms should be sent to the publishers. The use of registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the re
