Production Technology of Large-Area, Light-Weight, Flexible Solar Cell and Module
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Production Technology of Large-Area, Light-Weight, Flexible Solar Cell and Module Makoto Shimosawa, Shinichi KAWANO, Takamasa ISHIKAWA, Tetsuro NAKAMURA, Yasushi SAKAKIBARA, Shinji KIYOFUJI, Hirofumi ENOMOTO, Hironori NISHIHARA, Tomoyoshi KAMOSHITA, Masahide MIYAGI, Junichiro SAITO, and Akihiro TAKANO Photovoltaic Power Div., Fuji Electric Systems, 4003-1, Koei, Nankan-town, Tamana-county, Kumamoto-Pref., 861-0814, Japan ABSTRACT Production technologies of amorphous silicon / amorphous silicon germanium (a-Si/aSiGe) flexible film solar cells have been established. The solar cells having a unique monolithic device structure using through-hole contacts are continuously fabricated on flexible plastic films. We have developed various production technologies, such as high speed high quality a-Si deposition method, very high speed laser patterning method and so on. We constructed a new solar cell factory in Kumamoto, Japan, and started commercial production in 2006. We have production capacity of 12MW/Y using the new production line that can process 1m-wide and 2000m-long film substrates. We are planning to install two more production lines and have 40MW/Y production capacity in FY 2008.
INTRODUCTION We developed a unique monolithic device structure named ”SCAF” (Series-Connection through Apertures formed on Film substrate) (Fig.1) [1]. The most prominent feature of “SCAF” structure is through hole contacts made by mechanical punching hole formation and thin film metal film deposition on both sides of the film. There are two kinds of connection holes formed on the plastic film. One is a series connection hole and the other is a current collection hole. Accumulated layers on both sides of the film are divided into unit solar cells by laser patterning lined. The series connected unit cells through the contact holes generate high voltage. Series Connection Holes
Current Collection Holes
ITO
a-Si/a-SiGe Layer Metal Electrode
Laser Patterning Lines Plastic Film Substrate
Fig.1 Schematic diagram of SCAF solar cell [1].
In order to fabricate such unique series connection structure on plastic film substrate, we have developed a production line using roll-to-roll method including an improved roll-to-roll film deposition process named “stepping-roll process” as shown in Fig.2. Outline of the process sequence is as follows: (1) Series connection holes are made on the plastic film substrate by the punching apparatus. (2) Metal electrodes are deposited on both sides of the film substrate by a conventional roll-to-roll sputtering apparatus. (3) Current collection holes are made on the plastic film substrate by the punching process. (4) a-Si, a-SiGe and related layers, ITO and backside metal electrodes are deposited in succession in the stepping-roll apparatus. (5) Layers deposited on both sides of the substrate are divided by the laser-patterning technique to form unit cells.
Formation of Series Connection Holes
Metal Electrode Deposition
Punching Apparatus
Sputtering Apparatus
Formation of CurrentColeection H
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