An Analysis of the Focus Variation Microscope and Its Application in the Measurement of Tool Parameter
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International Journal of Precision Engineering and Manufacturing https://doi.org/10.1007/s12541-020-00419-4
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An Analysis of the Focus Variation Microscope and Its Application in the Measurement of Tool Parameter Lin Yuan1 · Tong Guo1,2 · Zhongjun Qiu1 · Xing Fu1,2 · Xiaotang Hu1,2 Received: 21 May 2020 / Revised: 7 September 2020 / Accepted: 15 September 2020 © Korean Society for Precision Engineering 2020
Abstract Ultra-precision manufacturing is essential to the production of workpieces of the highest quality in terms of form accuracy, surface accuracy, and integrity. Compared with physical and chemical material removal methods, it has the advantages of high efficiency, high flexibility, and low cost. Because of the direct interaction between the workpiece and the tool during the process of ultra-precision manufacturing, the geometrical parameters of the tool directly affect the surface quality of the workpiece and need to be measured accurately and comprehensively. However, due to the large surface slopes of some tools, some three-dimensional measurement methods cannot measure their geometrical parameters because of limited maximum measurement angle. In this work, we build a focus variation system to make three-dimensional measurements of tools and extract their geometrical parameters. The data processing procedures and the selection of experimental parameters are analyzed in detail using simulations and experiments. Furthermore, we use a step height standard to verify the high accuracy of the measurement system and a roughened flat surface to evaluate the measurement noise and vertical resolution. Measurements of the parameters of a round nose cutting tool and the surface texture parameters of a grinding tool are conducted and indicate that the focus variation system is suitable for measuring the geometrical parameters of tools for ultra-precision manufacturing. Keywords Ultra-precision manufacturing · Focus variation · Geometrical parameters · Surface texture parameters
1 Introduction Ultra-precision manufacturing has been widely applied in optoelectronic devices, the aerospace industry [1–4], and optical elements [5–8] because of the increasing requirement for high quality surfaces. It is an essential method in the production of workpieces of the highest quality in terms of form accuracy, surface accuracy, and integrity [9]. Ultraprecision manufacturing can provide a surface quality with up to sub-micrometric form accuracy and nanometric surface roughness, and unlike physical and chemical material removal methods, it is not limited by materials and has the advantages of high efficiency, high flexibility, and low cost. The various methods can be classified into ultra-precision * Tong Guo [email protected] 1
State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
Nanchang Institute for Microtechnology of Tianjin University, Tianjin 300072, China
2
turning, ultra-precision grinding, ultra-precision diamond milling, and ultra-p
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