Automated Reel-to-Reel Fluidic Self-Assembly for the Production of Solid State Lighting Modules
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Automated Reel-to-Reel Fluidic Self-Assembly for the Production of Solid State Lighting Modules Se-Chul Park1, Jun Fang1, Shantonu Biswas2, Mahsa Mozafari2, Thomas Stauden2, and Heiko O. Jacobs2 1 University of Minnesota, Electrical and Computer Engineering, 200 Union St. SE., Minneapolis, MN 55455, U.S.A. 2 Fachgebiet Nanotechnologie, Technische Universität Ilmenau, Gustav-Kirchhoff-Strasse 1, Ilmenau, D-98693, Germany ABSTRACT We report the implementation of an automated reel-to-reel fluidic self-assembly system based on surface-tension driven self-assembly for macroelectronics application. The reported system incorporates precisely controlled and automated agitation, web moving, component recycling, and dispensing system. The system enables continuous parallel assembly of semiconductor chips at a high rate (15,000 chips per hour using 2.5 cm wide web) and assembly yield (>99%) under optimal condition. In principle, scaling to any throughput should be possible considering the parallel nature of self-assembly. The process overcomes the limitations on area and throughput of prior methods. It provides a new platform for macroelectronics to enable the integration of microscopic high performance inorganic semiconductors on flexible substrates with any desired location, pitch, and integration density. As an example we demonstrate the fabrication of a solid state area lighting module. INTRODUCTION Macroelectronics is a new field of research where integration of semiconductor chips over large area is desired. In contrast with microelectronics where high integration density is an important motive of research, macroelectronics aims assembly of large number of functional chips over increasingly large area. In view of the recent trend towards large area integration, traditional methods of robotic pick-and-place are challenged to integrate functional devices over large areas in an economical fashion. Directed/engineered self-assembly is uniquely suited as a mechanism to solve this challenge. This methodology allows for the redistribution of components over large areas and the ordering of unorganized parts in a massively parallel fashion. The field of directed self-assembly has showed rapid progress in research. However, only two approaches provide assembly results achieving yield of 100%. The first method is based on shape recognition [1] and the second is based on surface-tension driven self-assembly using hydrophilic/hydrophobicity [2] or using solder [3, 4]. Most published reports, however, demonstrate assemblies over limited area using discontinuous batch with manual agitation. Herein, we report an implementation of a self-assembly process based on surface-tension driven self-assembly. The reported assembly process incorporates an automated machine based on a conveyer and a reel-to-reel (RTR) approaches. The installed platform has a capacity to assemble ~15,000 chips per hour with a 2.5 cm wide web using 500 μm sized square shaped silicon components. Optimized operation conditions provide assembly yield of 99.8%. As an
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