Characterization of High Temperature Superconducting Thin Film Grown by Laser Ablation Method

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CHARACTERIZATION OF HIGH TEMPERATURE SUPERCONDUCTING THIN FILM GROWN BY LASER ABLATION METHOD K.Shimizu*,H.Nobumasa*,N.Nagai"*,T.Matsunobe'" AND T.Kawai*" "Toray Ind.Inc.,2-l.Sonoyama 3-chomeOtsuShiga 520 Japan "Toray Research Center Inc.,1-iSonoyama 3-chome, Otsu, Shiga 520 Japan "**Osaka University,IbarakiOsaka 567,Japan ABSTRACT function of complex dielectric We have measured the the near infrared region directly by samples in Bi 2 Sr 2 CaCu 2 0, As for both single crystal and thin film, spectroellipsometry. superconducting samples have a zero point in the real part (e,) of and a clear peak of the the complex dielectric function WC) almost the same frequency. imaginary part of the inverse E" at On the other hand, non-superconducting samples have no such E, zero Then we point, and the peak height of (-Im(l/E')) becomes small. this samples by of the superconductivity can determine spectroellipsometry measurement at room temperature. INTRODUCTION is an effective method to study the Optical measurement electronic structure of materials when the complex dielectric there is In high Tc superconductors constant is obtained[l]. a common feature such as the reflectivity edge in the near infrared for understanding the region which is thought to be essential However the customary way of superconducting mechanism [2-5]. by using the constants the complex dielectric obtaining from some uncertainties transformation suffers Kramers-Kronig because of the extrapolation. Spectroellipsometry directly provides the complex dielectric is very reliable for studying the details of functions which frequency dependence features[6]. We have investigated the relation of the material and the complex superconductivity between dielectric function, as measured at room temperature. EXPERIMENTAL Ellipsometry The complex dielectric function was measured directly by The details are from 5000cm-' to 25000cm-1. spectroellipsometry shown in Tablel. Samples Bi 2 Sr 2 CaCu 2O0 thin films were prepared by laser ablation was used as a method. A single crystal of Bi 2 Sr 2 Ca1Cu 2O0 The details are shown in Table2. standard. RESULTS AND DISCUSSION Results

of

an

ellipsometry

measurement

for

Mat. Res. Soc. Symp. Proc. Vol. 236. @1992 Materials Research Society

a

single

450

Table 1

Apparatus

Ellipsometry

Spectroellipsometer NPDM-1000 (Nikon)

Spectrometer

M-70

Source

Halogen lamp

Detector

Si-Ge

Polarizer, Analyzer

Gran-Thomson

Incident Angle

80*

Frequency Range

5000-25000cm-'

Table 2

Thin

Film

Bi 2 Sr2CaCu 2 O

Method

Excimer Laser (ArF) Ablation

Substrate Samples A

samples

Polished MgOSingle crystal Dimension

3000A(thickness)x5mmx5mm

Deposition Rate

10001/hr

Substrate temp.

660t

Dimension

5000i (thickness)x5mmx5mm

Deposition Rate

50001/hr

Substrate temp.

680t

(c-axis oriented)

Samples B

(c-axis oriented)

Single Crystal

Method

TSFZ

Dimension

lmmx5mmx7mm

Superconductivity

90K (Tc zero)

(made by Kitahama and Iloriuchi of Osaka Univ.)

451

R (Y.)

Single crystal

A (deg) 50.0

50.0 40.0 30.0 20.0 10.0

0.0