Development of an Impedance-Based Electrical Humidity Sensor Using Sb-Doped Ge-Se-Te Chalcogenide Glasses
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https://doi.org/10.1007/s11664-020-08362-w Ó 2020 The Minerals, Metals & Materials Society
Development of an Impedance-Based Electrical Humidity Sensor Using Sb-Doped Ge-Se-Te Chalcogenide Glasses SURABHI MISHRA,1 POOJA LOHIA,2 PRIYANKA CHAUDHARY,3 B.C. YADAV,3 and D.K. DWIVEDI1,4 1.—Amorphous Semiconductor Research Lab, Department of Physics and Material Science, Madan Mohan Malaviya University of Technology, Gorakhpur 273010, India. 2.—Department of Electronics and Communication Engineering, Madan Mohan Malaviya University of Technology, Gorakhpur 273010, India. 3.—Nanomaterials and Sensors Research Laboratory, Department of Physics, Babasaheb Bhimrao Ambedkar University, Lucknow, U.P. 226025, India. 4.—e-mail: [email protected]
The present paper demonstrates the effect of humidity on the (Ge11.5Te12.5Se67.5)80Sb20 and (Ge11.5 Te12.5Se67.5)70Sb30 thin film deposited on a glass substrate. The films prepared using a thermal evaporation technique reveal an amorphous nature as observed from the x-ray diffraction (XRD) graph. The light absorption taking place in the UV-visible region was confirmed using a UV–Vis spectrophotometer, and optical bandgap values of 1.46 eV and 1.42 eV were found for (Ge11.5Te12.5Se67.5)80Sb20 and (Ge11.5 Te12.5Se67.5)70Sb30 alloys using Tauc’s plot. The films were investigated for an impedance-based electrical humidity sensor. The maximum sensitivity of the chalcogenide sensing element was 13.86 MX/%RH and 15.31 MX/%RH for (Ge11.5Te12.5Se67.5)80Sb20 and (Ge11.5 Te12.5Se67.5)70Sb30, respectively, in the range 10–25%RH at room temperature, and the average sensitivity for the entire range of %RH was 7.33 MX/%RH and 9.42 MX/%RH, respectively, for the two glasses. The aging effect for samples was found to be negligible; hence they are stable against time, which makes them suitable for use as humidity sensors. The repeatability of the sensors was 89% and 94.45%, respectively. Key words: Humidity sensor, chalcogenide glasses, sensitivity, aging effect
INTRODUCTION The production of high-purity chalcogenide glasses and investigation of their properties is an actively developed division of optical materials science. The properties of chalcogenide vitreous materials such as transparency, mechanical strength, and laser damage resistance are impurity-sensitive properties of these materials.1–3 Chalcogenide glasses, as the name implies, contain at least one chalcogen element: S, Se or Te. They are the subject of many studies for passive and active applications due to their large transmission range,
(Received March 21, 2020; accepted July 24, 2020)
extending from the visible to the mid-infrared depending on the chalcogen elements.4,5 These glasses are more attractive than silica glasses because of the low dispersion, high transmission and less change in the index of refraction with temperature. The broad infrared (IR) sensing of chalcogenides can be used for such applications as radiation sensors, temperature measurement and biological sensors. Due to good sensor-specific advantages in comparis
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