Development of Electrostatic Actuated Nano Tensile Testing Device for Mechanical and Electrical Characteristics of FIB D

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0924-Z04-12

Development of Electrostatic Actuated Nano Tensile Testing Device for Mechanical and Electrical Characteristics of FIB Deposited Carbon Nanowire Mario Kiuchi1, Shinji Matsui2,3, and Yoshitada Isono4 1 Graduate School of Science and Engineering, Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu, Shiga, 525-8577, Japan 2 Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo, 678-1201, Japan 3 CREAST JST, Japan Science and Technology Agency, Kawaguchi Center Building, 4-1-8, Honcho, Kawaguchi, Saitama, 332-0012, Japan 4 Department of Micro System Technology, Faculty of Science and Engineering, Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu, Shiga, 5258577, Japan

ABSTRACT This research develops Electrostatic Actuated NAno Tensile testing devices (EANATs) to evaluate mechanical and electrical properties of carbon nanowires fabricated by focus ion beamassisted chemical vapor deposition (FIB-CVD). This research carried out nanoscale uniaxial tensile tests for 90 nm- to 150 nm-diametric carbon nanowires using EANATs. Young’s modulus of cabon nanowires averaged 58 GPa, which was close to that of hydrogenated diamond-like carbon films. On average, fracture stress and strain of carbon nanowires reached values of 4.2 GPa and 0.08, respectively. This research also measured I-V characteristics of 100 nm-diametric carbon nanowires under tensile loading to reveal the piezo resistivity of nanowires. The piezoresistive effect of carbon nanowire was observed. The tensile load was about 0.75 GPa at maximum value of the resistance change. INTRODUCTION Nanoscale carbon related materials such as carbon nanotubes, fullerenes and diamondlike carbon (DLC) thin films are promising materials for use in nano electromechanical systems (NEMS), due to their requisite properties of high stiffness and electrical conductivity [1]-[3]. However, devices that include carbon nano-components have had difficulties related to assembly, which can impede reproducibility of production and performance of the devices. On the other hand, focused ion beam (FIB) assisted chemical vapor deposition (CVD) is a recently attractive technique used for the assembly of carbon nano-components [4]-[6]. FIB assisted CVD (FIB-CVD) enables the deposition of a three-dimensional carbon nano-component using phenanthrene (C14H10) gas. The formation of an overhang or hollow shaped carbon nanostructure at a specified and available location can be accomplished within several minutes. FIBCVD could therefore be an efficient method for integrating nanometric carbon structures on NEMS. The objective of this research is to evaluate mechanical and electrical properties of carbon nanowires deposited by FIB-CVD at room temperature, using Electrostatic Actuated NAno Tensile testing devices (EANATs). Electrostatic comb drive actuators, of 1000, 3000 and

5000 pairs, that were integrated into the EANATs acted to tension the carbon nanowires by application of a bias voltage to the actuators. Tensile load and displacem