Effect of a-SiC:H Film Composition on the Performance of Large Area Optical Sensors

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Effect of a-SiC:H film composition on the performance of large area optical sensors. P. Louro1, Yu. Vygranenko1, M. Fernandes1, M. Vieira1, and M. Schubert2 1 Electronics and Communications Dept., ISEL, R. Conselheiro Emídio Navarro, P 1949-014 Lisboa, Portugal. Email: [email protected] Institut fur Physikalische Elektronik, Universitat Stuttgart, Pfaffenwaldring 47, D-70569 Stuttgart, Germany. 2

ABSTRACT A series of large area single layers and heterojunction cells in the assembly glass/ZnO:Al/p (SixC1-x:H)/i (Si:H)/n (SixC1-x:H)/Al (0