Electroelastic Actuator for Nanomechanics
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troelastic Actuator for Nanomechanics S. M. Afonin* National Research University of Electronic Technology (MIET), Moscow, 124498 Russia *e-mail: [email protected] Received September 17, 2020; revised October 10, 2020; accepted October 20, 2020
Abstract—Structural-parametric models of electroelastic actuators for nanomechanics are presented. The structure of the actuators is established, and their transfer functions are determined. Transfer functions are derived for a piezo actuator with a generalized piezo effect. The change in elastic pliability and rigidity of the actuator is established in the case of voltage control and also current control. Keywords: electroelastic actuators, piezo actuator, structural-parametric model, transfer functions, structure, nanomechanics DOI: 10.3103/S1068798X20110039
Electroelastic actuators with piezoelectric and electrostrictional effects are promising for use in nanomechanics and nanotechnology, nanobiology, the power industry, microelectronics, and astronomy. A piezo actuator is a piezomechanical device for setting mechanisms in motion or controlling them on the basis of the piezo effect and also for converting electrical signals into mechanical parameters: displacement and force. Nanometric precision of mechanical devices is ensured by precision mechatronic systems with electroelastic actuators. Cellular structures based on piezo actuators are used in nanomechanics. Piezo actuators for nanomechanical devices are used in photonics, adaptive optics, and nanotechnology in adjusting mirrors of annular laser gyroscopes, in information and energy transmission in laser systems, and for assembly and scanning purposes in electron, probe, and scanning-probe microscopes [1–12]. The structural-parametric model of an electroelastic actuator in nanomechanical devices provides a system of equations for Laplace transformation of the displacement of the tips of the device. Taking account of the actuator’s electromechanical parameters, this system describes its structure and the conversion of the electrical energy to mechanical energy, as well as the corresponding Laplace transformations of the displacements and forces at the tips of the actuator. In the present work, a structural-parametric model of an electroelastic actuator for nanomechanics is derived by means of mathematical physics, taking account of solutions of the wave equation for different boundary conditions. By means of Laplace transformation, the wave equation with partial derivatives of hyperbolic type is reduced to a linear differential equation. The transfer functions of nanoactuators are determined
from the structural-parametric model of the actuator, in contrast to the expressions derived from equivalent electrical circuits of piezoconverters, piezoemitters, piezoreceivers, and piezovibrators with velocity and pressure as the output parameters [2, 8]. In the present work, the influence of the direct piezo effect on the voltage that acts at the actuator plates is taken into account; the change in elastic pliability due to the dir
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