Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope
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TECHNICAL PAPER
Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope Arnab Biswas1 • Vishal S. Pawar1 • P. Krishna Menon2 • Prem Pal3 • Ashok Kumar Pandey1 Received: 8 August 2020 / Accepted: 10 October 2020 Springer-Verlag GmbH Germany, part of Springer Nature 2020
Abstract Fabrication of high aspect ratio microelectromechanical systems (MEMS) like comb drive structures are mostly done by DRIE (Deep Reactive Ion Etching) process. Bosch process is a type of DRIE which involves alternate repetition of plasma etching and side wall passivation to achieve deep vertical structures. A continued plasma etching may lead to tapered wall due to some lateral etching. Although, a straight and smooth wall is expected due to combined alternate processes of etching and passivation, very often the resulting walls are having surface undulations called as scalloping. So, due to slanting, scalloping and combined slanting and scalloping defects the working and performance of a MEMS device get affected. MEMS gyrocope is one such widely comercialized device, which is required to measure angular rotation wth certain accuracy. We take a simple single-axis MEMS vibratory gyroscope to study the effect on these defects on its dynamics performance. The study presented in the paper may be useful for including undesirable effects in designing MEMS vibratory gyroscopes.
1 Introduction Gyroscope is an essential element of inertial measurement units (IMU), inertial navigation system (INS), attitude heading reference systems, etc., to measure angular rotation Passaro et al. (2017). There are different types of gyroscopes, namley, mechanical gyrocope which includes classical gyroscope and vibrating structure gyroscope; optical gyroscope like fibre optic gyroscope and ring laser gyroscope; and recently developed quantum gyroscope as shown in Fig. 1a. While optical gyroscopes Jete and Lefevre (1981) have high resolution and precision, they are costly. Consequently, different designs of vibratory MEMS
Biswas et al.: Effect of Fabrication Defects on the Performance Parameters of a MEMS Gyroscope. & Ashok Kumar Pandey [email protected] 1
Mechanical and Aerospace Engineering, Indian Institute of Technology Hyderabad, Kandi, Sangareddy, Hyderabad, TS 502285, India
2
Research Centre Imarat, Hyderabad, India
3
Department of Physics, Indian Institute of Technology Hyderabad, Kandi, Sangareddy, Hyderabad, TS 502285, India
(microelectromechanical system) gyroscope such as hemispherical/shell type gyroscope Singh et al. (2020), ring type gyroscope Shu et al. (2020), and tuning fork type gyroscope Venkatesh et al. (2009) have been studied to achieve low cost, lower powered, and efficient MEMS gyroscope in the area of consumer electronics such as smart phones, cameras, car navigation system, vehicle stability controllers and drones, aerospace vehicles, etc Neal and Luque (2009); Jiri (2010); Ghasemzade and Jamshidi (2018). Inspite of so much of effort, development of sta
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