Long-term Room Temperature Instability in Thermal Conductivity of InGaZnO Thin Films

  • PDF / 223,564 Bytes
  • 6 Pages / 432 x 648 pts Page_size
  • 55 Downloads / 203 Views

DOWNLOAD

REPORT


/RQJWHUP5RRP7HPSHUDWXUH,QVWDELOLW\LQ7KHUPDO&RQGXFWLYLW\RI,Q*D=Q27KLQ )LOPV  %R\D&XL'%UXFH%XFKKRO]/L=HQJ0LFKDHO%HG]\N5REHUW3+&KDQJ0DWWKHZ *UD\VRQ 



$SSOLHG3K\VLFV3URJUDP1RUWKZHVWHUQ8QLYHUVLW\(YDQVWRQ,/86$ (OHFWULFDO(QJLQHHULQJDQG&RPSXWHU6FLHQFH1RUWKZHVWHUQ8QLYHUVLW\(YDQVWRQ,/ 86$  0DWHULDO6FLHQFHDQG(QJLQHHULQJ1RUWKZHVWHUQ8QLYHUVLW\(YDQVWRQ,/86$  $%675$&7  7KHFURVVSODQHWKHUPDOFRQGXFWLYLWLHVRI,Q*D=Q2 ,*=2 WKLQILOPVLQGLIIHUHQW PRUSKRORJLHVZHUHPHDVXUHGRQWKUHHRFFDVLRQVZLWKLQPRQWKVXVLQJWKHω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etc.>±@7KHHOHFWULFDOSHUIRUPDQFHRI ,*=2WKLQILOPVZHUHIRXQGWRYDU\ZLWKDPELHQWHQYLURQPHQWIRUH[DPSOHWHPSHUDWXUH>@ OLJKWLOOXPLQDWLRQ>@DQGPRLVWXUH>@%XWWKHVWXG\RIDPELHQWHIIHFWVRQ,*=2WKHUPDO FRQGXFWLYLW\KDVEHHQODFNLQJWKRXJKLWLVLPSRUWDQWIRUWKHGHYLFHWKHUPDOPDQDJHPHQWDQGWKH SRWHQWLDODSSOLFDWLRQRI,*=2LQ³LQYLVLEOHWKHUPRHOHFWULFV´>@)XQGDPHQWDOO\DQ XQGHUVWDQGLQJRIWKHUPDOFRQGXFWLYLW\FKDQJHVPD\DOVRVKHGOLJKWRQXQGHUVWDQGLQJWKHHOXVLYH VWUXFWXUHDQGERQGLQJLQWKLVFRPSOH[R[LGHV\VWHP ,QWKLVVWXG\WKHFURVVSODQHWKHUPDOFRQGXFWLYLW\RI,*=2WKLQILOPVDUHPHDVXUHGDWURRP WHPSHUDWXUHXVLQJWKHωWHFKQLTXHRQWKUHHRFFDVLRQVZLWKLQPRQWKVEHWZHHQZKLFKWKH VDPSOHVKDYHEHHQNHSWLQDGHVLFFDQWZLWKDWPRVSKHUHSUHVVXUH$OOWKHILOPVDUHJURZQE\ SXOVHGODVHUGHSRVLWLRQ 3/' ZKHUHE\GLIIHUHQWJURZWKFRQGLWLRQVUHVXOWLQWKUHHPRUSKRORJLHV LQFOXGLQJDPRUSKRXV D VHPLFU\VWDOOLQH VHPLF DQGVLQJOHFU\VWDOOLNH F ,*=2VWUXFWXUH ;UD\GLIIUDFWLRQ ;5' LVFRQGXFWHGWRG