Metallization of glass/ceramic from solutions of organometallic compounds by laser induced pyrolysis
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S. A. Gangal Department of Electronics Science, University of Poona, Pune 411 007, India
S. B. Ogale Centre for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona, Pune 411 007, India (Received 8 April 1991; accepted 24 March 1992)
Direct writing of iron lines on glass and A12O3 has been achieved by CW CO 2 laser-driven pyrolytic dissociation of volatile iron pentacarbonyl liquid. Since a very high organometallic molecular density is realized in the solution, use of a liquid precursor has enabled deposition of micron-thick iron films at the writing speeds of 10-400 mm s"1, which are significantly higher as compared to those achievable by the conventional CVD method. The iron stripes deposited on the glass substrate at the laser power density of 5.3 kW cm"2 and the writing speed of 100 mm s"1 are found to have a resistivity of about 580 //ohm-cm. These stripes have been found to have an integral bond with the substrate due to the interface reaction.
I. INTRODUCTION Laser induced deposition is a rapidly developing research area at the present time in view of its significant implications for modern materials science and technology. The laser beams offer the distinct advantage of allowing propagation through a wide variety of chemically reactive environments. This factor coupled with the choice of a suitable wavelength, the power range, and the ease of manipulation of laser beams can render tremendous flexibility in driving and controlling the diverse laser-induced surface-chemical processes. The method of laser induced pyrolytic processing involves use of a laser as a directed heat source. The laser energy transfer may occur in the precursor either directly or indirectly via a local surface which can produce a near thermal distribution of the excited species. In the process of laser chemical vapor deposition (LCVD), strong localization of the area illuminated by the laser beam makes very high reaction temperatures possible, leading to a large volume preheating of reactants and reducing incorporation of contamination from the heated surfaces other than the substrate. The process of laser induced pyrolytic decomposition of the host organometallic molecules on a substrate surface offers a direct spatial control over the deposition as compared to the conventional pyrolytic method. Single step direct writing of intricate surface structures with a good lateral resolution has been shown to be possible with the help of highly focused laser beams. It has indeed been demonstrated that thin metallic films can J. Mater. Res., Vol. 7, No. 7, Jul 1992 http://journals.cambridge.org
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be deposited by the established route of laser-driven decomposition of volatile metal-containing compounds.1"7 Thus far, many kinds of metals have been deposited on semiconductors or insulators by the decomposition of inorganic or organometallic precursors in the form of a gas phase,5"10 a solution,11"14 or a solid matter.15"18 Depositions from both the gaseous and the liq
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