Micro-scale Additive Manufacturing Using the Optical Potential Generated by a Bessel Beam
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ORIGINAL ARTICLE
Micro‑scale Additive Manufacturing Using the Optical Potential Generated by a Bessel Beam Masaki Michihata1 · Makoto Yokei1 · Shotaro Kadoya2 · Satoru Takahashi2 Received: 8 July 2020 / Revised: 2 September 2020 / Accepted: 24 September 2020 © International Society for Nanomanufacturing and Tianjin University and Springer Nature Singapore Pte Ltd. 2020
Abstract In this study, we proposed a novel micro-scale additive manufacturing method based on the optical potential formed by a Bessel beam. The proposed technique is expected to show no deterioration in manufacturing resolution due to heat generation, to be applicable to various materials, and to be able to be performed in an air environment. The basic principle of the proposed method involves accumulating and stacking particles dispersed in air by using optical radiation pressure. In this paper, the trajectory of the accumulated particles was numerically estimated and experimentally observed. The numerical and experimental results agreed well; specifically, the background flow carried the particles to the optical axis of the Bessel beam, and then the particles were localized at the bottom of the optical potential valley on the substrate. Finally, a pillar structure was fabricated with polystyrene particles having a diameter of 1 μm, which indicated that the proposed technique was promising for practical applications. Keywords Additive manufacturing · Optical radiation pressure · Optical trapping potential · Bessel beam · Nanoparticles
1 Introduction Nano/micro-manufacturing technology for high value-added products such as those made by ultra-fine machining [1] or lithography [2], electrolytic processing [3], laser processing [4], etc. has been developed. Techniques for processing three-dimensional fine structures with a wide processing area and a high degree of freedom in shape will be required. Additive manufacturing technology using lasers is one attractive technique. Optical energy can be locally applied by focusing a light beam, realizing high resolution and high shape controllability. In addition, since multiple spots can be easily generated, it is possible to increase the processing efficiency [5]. Various additive processing micro-manufacturing techniques using focused beams have been developed [5–13]. Most of them are, in principle, based on the energy absorption of materials to excite a chemical reaction in the * Masaki Michihata [email protected]‑tokyo.ac.jp 1
Department of Precision Engineering, The University of Tokyo, 7‑3‑1 Hongo, Bunkyo, Tokyo 113‑8654, Japan
Research Center for Advanced Science and Technology, The University of Tokyo, 4‑6‑1 Komaba, Meguro, Tokyo 153‑8904, Japan
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medium by the high energy density near the focal spot of the focused beam. For example, photo-polymerization [6, 7], photocatalytic excitation [8], reduction of metal ions [9], chemical vapor deposition (CVD) [10, 11], and laser ablation [12] have been proposed. Significantly, with nanostereolithography using two-photon absorption [7] an
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