Quartz Micro-machining Using Wire Electrochemical Spark Machining Process
In this modern age of miniaturization, many micro-slits are usually manufactured on quartz material and are used to improve performance. Quartz has the unique properties of wear resistance, high hardness, frequency stability, brittleness, biocompatibility
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1 Introduction In the past decades, various engineering insulating materials such as polymers, ceramics, composites, glasses, polydimethylsiloxane (PDMS), and Pyrex have incredible industrial applications in the defense, aviation, micro-electromechanical systems, optical, micro-opto-electromechanical, robotics, biomedical, electronics field, and space [1–9]. Nowadays, various micro-fluidic devices are widely taken for study at depth, and miniaturization of it will enable favorable applications for biological and chemical research. Mostly, micro-fluidic channels are made of glass and polymers materials. However, some major machining issues have been observed with the uses of a polymer material such as low solidity and permeability to moisture and meager chemical resistance. [8, 10–13]. Quartz is an untainted form of silica have over 99.9% SiO2 contain and used widely in opto-electronics, computers, smartphones, micro-optics, etc. Further, it has high transmission, thermal chemical, and electrical resistivity, and due to these properties, it is hard to machine for micro-applications. However, few non-conventional micro-machining processes already used to machine quartz in micro-region. This process includes ultrasonic machining [14], Nd: Yag laser A. D. Oza (B) · A. Kumar Department of Industrial Engineering, Pandit Deendayal Petroleum University, Gandhinagar 382007, Gujarat, India e-mail: [email protected] V. Badheka · A. Nema Department of Mechanical Engineering, Pandit Deendayal Petroleum University, Gandhinagar 382007, Gujarat, India M. Kumar Department of Production and Industrial Engineering, Punjab Engineering College (Deemed to Be University), Chandigarh 160012, India © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2021 H. K. Dave and D. Nedelcu (eds.), Advances in Manufacturing Processes, Lecture Notes in Mechanical Engineering, https://doi.org/10.1007/978-981-15-9117-4_8
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machining[15], abrasive slurry jet [16], rotary ultrasonic drilling [17], laser-assisted dry micro-grinding [18], ultrashort laser pulses [19], ultrashort laser machining [20], etc. However, these processes used highly sophisticated and costly instruments, and as a result machining and maintenance cost increases. Furthermore, higher HAZ, tool wear, and low material removal rate are key limitations [21–26]. Moreover, some well-known non-traditional micro-machining processes like W-EDM, ECM, and EDM cannot machine non-conductive materials like quartz used in this case. Utilizing the benefits of two or more non-conventional machining processes, we can develop a hybrid machining procedure which can assist in machining of electrically non-conductive materials. One such process is ECDM and the method of which this content would be is wire electrochemical spark machining (WECSM) process. Varieties of high-strength, brittle materials, which are electrically non-conducting in nature, can be machine by wire electrochemical spark machining (WECSM) process [27–30]. WECSM process is a
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