Silicon-based microplatforms for characterization of nanostructured layers with application in intermediate temperature
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Silicon-based microplatforms for characterization of nanostructured layers with application in intermediate temperature micro solid oxide fuel cells I. Garbayo1, A. Tarancón1,2, J. Santiso3, A. Cavallaro3, I. Gràcia1, C. Cané1, N. Sabaté1 1 National Institute of Microelectronics, IMB-CNM (CSIC), Campus UAB, Bellaterra, Barcelona E-08193, Spain. 2 Department of Advanced Materials for Energy Applications, Catalonia Institute for Energy Research (IREC), C/ Josep Pla 2, edifici B2, Planta Baixa, Barcelona E-08019, Spain. 3 Research Center in Nanoscience and Nanotechnology, CIN2, CSIC/ICN, Campus UAB, Bellaterra, Barcelona E-08193, Spain. ABSTRACT The present work is devoted to study the development of yttria-stabilized zirconia membranes self-supported on silicon-based microplatforms, to be used as electrolytes on micro solid oxide fuel cells. The microfabrication process to obtain yttria-stabilized zirconia membranes is detailed, and some key aspects for the integration of yttria-stabilized zirconia films deposited by pulsed laser deposition on the silicon-based microplatform are shown. Moreover, the effect on the thermomechanical stability of different fabrication parameters is presented, as well as the way to control the pinhole generation on the membranes. Finally, some electrical characterization guidelines are included, in order to study the effects of the platform and the membrane dimensions on the different measurements performed. INTRODUCTION Recent successful studies on micro fuel cells have showed them as potential candidates to substitute batteries for powering portable devices due to their reduced size, high life time, high power density and possibility of integration [1-3]. Among them, the most promising for miniaturization are the so-called polymer electrolyte fuel cells (PEMFC) and solid oxide fuel cells (SOFC) [4,5]. The development of micro solid oxide fuel cells (µSOFCs) has been based on selfsupported membranes, for application in both the low power range from 1 to 5W and the µW-tomW range [6-9]. However, big efforts are required since some fundamental challenges are still open. For instance, the development of thermomechanically stable and reproducible thin electrolytes for working at low temperatures while keeping good electrical properties is still a big issue. Limitations associated with the stability of these thin electrolytes at working temperatures (450-550ºC) and their electrochemical performance are other major drawbacks to overcome. In addition, the evaluation of mechanical or electrical properties on thin films is not an easy task due to the intrinsic effect of the substrate. In order to partially solve this problem, a silicon-based micro-platform has been developed for this work to support an electrolyte membrane while maintaining a simple mechanical and electrical access to it. A detailed understanding of this micro-platform and the electrolyteplatform system as a whole will allow decoupling the main characteristics of the electrolyte itself.
OBTAINING OF YSZ SELF-SUPPORTE
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