Realization of 3D Isotropic Negative Index Materials using Massively Parallel and Manufacturable Microfabrication and Mi
- PDF / 1,041,029 Bytes
- 7 Pages / 612 x 792 pts (letter) Page_size
- 94 Downloads / 173 Views
0919-J02-01
Realization of 3D Isotropic Negative Index Materials using Massively Parallel and Manufacturable Microfabrication and Micromachining Technology Logeeswaran VJ1, M. Saif Islam1, Mei Lin Chan2, David A Horsley2, Wei Wu3, Shih-Yuan Wang3, and R. Stanley Williams3 1 Electrical & Computer Engineering, University of California at Davis, Kemper Hall, One Shields Ave, DAVIS, CA, 95616 2 Mechanical & Aeronautical Engineering, University of California at Davis, Bainer Hall, One Shields Ave, DAVIS, CA, 95616 3 Quantum Science Research, Hewlett Packard Laboratories, 1501 Page Mill Rd, Palo Alto, CA, 94304
ABSTRACT In this paper, we present a method to realize a three dimensional (3D) homogeneous and isotropic negative index materials (3D-NIMs) fabricated using a low cost and massively parallel manufacturable microfabrication and microassembly technique. The construction of selfassembled 3D-NIM array was realized through two dimensional (2-D) planar microfabrication techniques exploiting the as-deposited residual stress imbalance between a bi-layer consisting of e-beam evaporated metal (650nm of chromium) and a structural layer of 500nm of low stress silicon nitride deposited by LPCVD on a silicon substrate. A periodic continuation of a single rectangular unit cell consisting of split-ring resonators (SRR) and wires were fabricated to generate a 3D assembly by orienting them along all three Cartesian axes. The thin chromium and silicon nitride bi-layer is formed as hinges. The strain mismatch between the two layers curls the structural layer (flap) containing the SRR upwards. The self-assembled out-of-plane angular position depends on the thickness and material composing the bi-layer. This built-in stress-actuated assembly method is suitable for applications requiring a thin dielectric layer for the SRR. The split-ring resonators and other structures are created on the membrane which is then assembled into the 3-D configuration. INTRODUCTION In the past 6 years, interests have grown in the research community on the “discovery” of materials that have been termed Metamaterials (MTM), also known as Negative Index Material (NIM), Double Negative Media (DNM), Left-Handed Media (LHM), Backward Wave Media (BWM), and Negative Refractive Index media (NRI). These metamaterials are new class of artificial electromagnetic materials that exhibit unique properties that are consistent with simultaneous negative permittivity (ε < 0) and negative permeability (µ < 0) as postulated by Veselago [1] some 40 years ago. The existence of NIM was first experimentally verified by Smith and coworkers [2] from earlier work of Pendry and coworkers [3, 4] who introduced the first design for a negative permittivity, ε and permeability, µ material. Such an unconventional electromagnetic material property provides some unique and exotic application areas in, for example, new design in
airborne radar, thin slab of “perfect” lenses where images are no longer subject to the conventional diffraction limits [5, 6], higher resolution magnetic resonan
Data Loading...
