Recent Progress in High Power Excimer Laser Development for Producing Next Generation Large-Area Electronic Devices
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Recent Progress in High Power Excimer Laser Development for Producing Next Generation Large-Area Electronic Devices. A.Demin, V.Vodchits, A.Eltzov, O.Kristoforov, Yu.Kirukhin, A.Vinokhodov, V.Borisov, State Research Center of Russian Federation Troitsk Institute for Innovation and Fusion Research, TRINITI, 142190, Troitsk Moscow reg. Russia; R.Osmanov, I.Bragin, K.Vogler, U.Rebhan, M.Rahe, U.Stamm, D.Basting, Lambda Physik, Hans-Bökler-Str., 12,37079 Göttingen, Germany.
ABSTRACT This paper reviews the results of the development of high power (up to 1 kW), high energy (up to 10J) prototypes of excimer lasers that are of interest to meet expanding requirements of the electronic industry. Some experimental characteristics are presented for various excimer prototypes operating at the important wavelength of 308nm (XeCl).
Keywords: Excimer laser, average power, output energy, annealing
INTRODUCTION Application of excimer lasers as powerful sources of ultraviolet light has been making steady headway since their appearance in 1975. Excimer Laser Crystallization (ELC) for fabrication of thin-film-transistors and DUV lithography are, perhaps, most prominent examples of excimer laser applications. Conventional ELC technique is based on using of a line-shaped laser beam, which is as long as a side of a glass panel about 300 x 400 mm2. The modern commercial XeCl lasers, such as Lambda STEEL are commonly used for the ELC. A new generation of XeCl lasers capable of emitting energy greater than 1J may be needed for processing of bigger panels. The conventional ELC process produces uniform poly-Si films with the carrier mobility of 50 - 80cm2/Vs. A new ELC technique, Sequential Lateral Solidification (SLS), [1] provides Si films with a higher carrier mobility in the range 300 ÷ 500cm2/Vs. In accordance with some estimation, the best parameters of the XeCl laser for the SLS may be 4 - 8 J/pulse at 100 ÷ 50 Hz repetition rate. In addition, longer pulse duration (50 - 100 ns FWHM) may be important for SLS. Lambda STEEL 1000 is the most powerful XeCl laser available on the market today. As a basis for comparison with following results, specification of the Lambda STEEL 1000 is represented in table 1.
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Table 1. LAMBDA STEEL 1000 Wavelength Stabilized Energy Stabilized Average Power Max. Repetition Rate Pulse Duration (typ.,FWHM) Pulse to Pulse Energy Stability (6 sigma ) Beam Dimensions(typ.,FWHM) Beam Divergence(typ.,FWHM) Gas Life Time Cabinet Size ( l x w x h)
308 nm 1000 mJ 300W 300 Hz 20 – 25 ns ≤ 15 % 36 x 13 mm2 ≤4,5 x ≤1,5 mrad > 20*106 pulses 2500 x 850 x 1900 mm3
MODEL HPEL (HIGH POWER EXCIMER LASER) In this model we have used a novel technology, which allows increasing output energy above 1J using a compact laser tube. The key of our technology is a discharge system with patented UV preionizer based on the creeping discharge [2,3]. This discharge system allows us to obtain a wide range of beam dimensions (up to 120 x 100 mm2) and output energies (up to 20J) [2]. The model HPEL being developed at the TRINITI in c
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