Research of SAW Temperature and Pressure Dual Parameter Measuring Sensor Based on Delay Line Type
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ENERAL EXPERIMENTAL TECHNIQUES
Research of SAW Temperature and Pressure Dual Parameter Measuring Sensor Based on Delay Line Type Yuanyuan Lia,*,**, Gang Yanga, Le Caoa, Bei Jianga, and Xuemi Jia a
Shanghai University of Engineering Science, Songjiang District, Shanghai, China *e-mail: [email protected] **e-mail: [email protected]
Received February 12, 2020; revised April 19, 2020; accepted April 20, 2020
Abstract—Surface acoustic wave (SAW) temperature and pressure sensors have been rapidly developed. A surface acoustic wave sensor with a dual-port delay line structure was designed and optimized by COMSOL software. The temperature and pressure measurement accuracy of the sensor is studied. In the signal measurement system, the signal is processed by the mixing detection method and the phase detection method. The perturbation quantity of pressure and temperature can be obtained by analyzing the perturbation relation between frequency and pressure, phase, and temperature. The results show that the sensitivity of the sensor is 339.175 kHz/N in the micro-pressure measurement of 0–0.2 N. The frequency error after optimization is between –3.3 and 4 kHz, and the error rate is 2.95%. In the case of 25–95°C, the sensitivity of the sensor is 0.045861 rad/°C. It lays a foundation for the research of the SAW multi-parameter measuring sensor. DOI: 10.1134/S0020441220050231
1. INTRODUCTION Temperature and pressure are the two most commonly used indicators in engineering. At present, the measurement of temperature and pressure mainly consists of piezoelectric, capacitive and inductive multisensors [1]. These measurement methods require an active wired operation. And multiple sensors are needed to achieve simultaneous temperature and pressure measurements. Therefore, the SAW sensor has begun to appear in the field of detection due to its unique physical properties. It has the characteristics of small size, high sensitivity, good stability, and passive wireless [2], which provides a new design idea for temperature and pressure dual-parameter measurement in complex environments. With the development of SAW sensor technology, the measurement field of SAW sensors has also been expanded. In 2009, a new SAW sensor for simultaneous measurement of temperature and pressure applied to the Automotive Tire Pressure Detection System (TPMS) are designed by Liu et al. [3]. The effect of temperature and pressure on the sensor is reflected by detecting changes in the RF echo signal. But the SAW will have some loss during the reflection process. In 2013, GA Borrer and others proposed a new SAW sensor based on multi-physics coupled design [4]. The sensor design achieved pressure, temperature and impedance measurements by constructing a multi-physics coupling model. And it provided an idea
for the SAW parametric measurement sensor design. In 2015, a SAW passive wireless sensor for detecting a magnetic field, humidity and temperature were designed by Li et. al [5]. The structure uses a cantilever beam dualchannel design to achieve sensor
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