Room temperature ammonia gas sensing characteristics of copper oxide-tin oxide composite thin films prepared by radio fr
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Room temperature ammonia gas sensing characteristics of copper oxide-tin oxide composite thin films prepared by radio frequency magnetron sputtering technique S. R. Cynthia1, R. Sivakumar2,* K. Jeyadheepan5
, C. Sanjeeviraja3, C. Gopalakrishnan4, and
1
Department of Physics, Alagappa Chettiar Government College of Engineering and Technology, Karaikudi 630003, India Department of Physics, Directorate of Distance Education, Alagappa University, Karaikudi 630003, India 3 Department of Electronics and Communication Engineering, Alagappa Chettiar Government College of Engineering and Technology, Karaikudi 630003, India 4 Department of Physics and Nanotechnology, SRM Institute of Science and Technology, Kattankulathur 603203, India 5 School of Electrical and Electronics Engineering, SASTRA Deemed to be University, Thanjavur 613401, India 2
Received: 20 May 2020
ABSTRACT
Accepted: 26 August 2020
In this work, thin films of composite copper oxide-tin oxide [CuO:SnO2 (1:1)] were prepared by radio frequency magnetron sputtering technique at room temperature on quartz glass substrates. X-ray diffraction study revealed that the as-deposited films were amorphous in nature and the crystallinity of the films was obtained by annealing the films at 1000 °C. The hexagon rod-like structure, dews-like particles and cylindrical-shaped particles were observed in surface morphological study. The X-ray photoelectron spectroscopic study confirmed the formation of Cu2? and Sn4? states in the deposited films. The decrease in optical energy band gap with increase in RF power and annealing temperature may be due to the creation of localized states near the band edges of CuO:SnO2. The gas sensing characteristics of the films were analysed by recording the electrical resistance variation of the films in the presence/absence of various concentrations of NH3 gas at room temperature. The CuO:SnO2 film exhibited a highest sensing response of 3838 for 125 ppm of NH3 gas at room temperature. The film sustained its initial sensor response even after 6 months period for 5 repeated cycles, which ascertained the stability and repeatability of CuO:SnO2 thin film based gas sensor.
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Springer Science+Business
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https://doi.org/10.1007/s10854-020-04353-z
J Mater Sci: Mater Electron
1 Introduction The atmospheric pollution from automobiles and industrial exhausts has become a global issue. For the survival of the living beings and for the better control of the environment, the detection of toxic, hazardous, combustible gases have become an indispensable for human beings. Among the various toxic gases, NH3 gas is a pungent odour irritant gas and exposure to NH3 may lead to skin, eye injuries and lung damage. The highly water soluble nature of NH3 gas makes to absorb quickly onto the mucosal membrane and skin, which in turn reacts with water to form highly irritant and caustic ammonium hydroxide. However, the extent of the damage depends on the durat
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