SMA Microvalves
In terms of identifying applications of SMA microactuators the field of microfluidics appears to be particularly promising. An approach to the development of SMA microvalves is described in the following. It is based on hybrid integration of micromachined
- PDF / 26,487,371 Bytes
- 265 Pages / 439.37 x 666.142 pts Page_size
- 23 Downloads / 174 Views
The photo shows a scanning electron micrograph of a shape memory microactuator. The microactuator has been developed by Dr. Klaus Skrobanek and the author for control of the defiection of a membrane. It consists of eight double beams, whose lateral shape has been designed for optimum use of the shape memory effect upon bending actuation. Fabrication has been done by laser cutting of a cold-rolled thin plate ofNiTi.
M. Kohl
Shape Memory Microactuators With 149 Figures
~ Springer
PD Dr. rer. nato habil. Manfred Kohl Forschungszentrum Karlsruhe Institut für Mikrostrukturtechnik Postfach 3640 76021 Karlsruhe, Germany E-mail: [email protected]
Se ries Editors: Professor Dr. H. Baltes ETH Zürich, Physical Electronics Laboratory ETH Hoenggerberg, HPT-H6, 8093 Zürich, Switzerland
Professor Dr. Hiroyuki Fujita University of Tokyo, Institute of Industrial Science 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan
Professor Dr. Dorian Liepmann University of California, Department of Bioengineering 466 Evans Hall, #1762, Berkeley, CA 94720-1762, USA
ISSN 1439-6599 ISBN 978-3-642-05837-0 ISBN 978-3-662-09875-2 (eBook) DOI 10.1007/978-3-662-09875-2 Library of Congress Control Number: 2004'023'5 This work is subject to copyright. All rights are reserved, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilm or in any other way, and storage in data banks. Duplication of this publication or parts thereof is permitted only under the provisions of the German Copyright Law of September 9, '965, in its current version, and permission for use must always be obtained from Springer-Verlag Berlin Heidelberg GmbH. Violations are liable for prosecution under the German Copyright Law. springeronline.com Springer-Verlag Berlin Heidelberg 2004 Originally published by Springer-Verlag Beflin Heidelbefg New York in 2004 Softcover reprint of the hardcover I st edition 2004 The use of general descriptive names, registered names, trademarks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. ©
Typesetting by the author Cover concept: eStudio Calamar Steinen Cover production: design & production GmbH, Heidelberg Printed on acid-free paper
10884414
57/3141/ba - 5 4 3210
Contents
Preface ................................................................................................................. IX Glossary of Notations ......................................................................................... XI 1 Introduction and Overview.............................................................................. l 2 Microactuators .................................................................................................. 5 2.1 Actuation Principles ................................................................................... 6 2.1.1 Electrosta
