Specimen Damage by Electron Irradiation
Most of the energy dissipated in energy losses is converted into heat. The rise in specimen temperature can be decreased by keeping the illuminated area small.
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Transmission Electron Microscopy Physics of Image Formation and Microanalysis With 264 Figures
Springer-Verlag Berlin Heidelberg GmbH 1984
Professor Dr. LUDWIG REIMER Physikalisches Institut, Westflilische WIlhelms-Universitiit MUnster, DomagkstraBe 75, D-4400 MUnster, Fed. Rep. of Germany
Editorial Board
ARTHUR L.SCHAWLOW, Ph.D. Department of Physics, Stanford University Stanford,CA 94305, USA
JAYM.ENOCH, Ph.D. School of Optometry, University of California Berkeley, CA 94720, USA
Professor KOICHI SHIMODA Faculty of Engineering, Keio University 3-14-1 Hiyoshi, Kohoku-ku Yokohama 223, Japan
DAVIDL.MAcADAM, Ph.D. 68 Hammond Street, Rochester, NY 14615, USA
THEODOR TAMIR, Ph.D. 981 East Lawn Drive, Teaneck, NJ 07666, USA
ISBN 978-3-662-13555-6 DOI 10.1007/978-3-662-13553-2
ISBN 978-3-662-13553-2 (eBook)
Library of Congress Catolging in Publication Data. Reimer, L. (Ludwig), 1928-. Transmission electron microscopy. (Springer series in optical sciences; v. 36). 1. Electron microscope, Transmission. I. Title. II. Series. QH212.T7R431983 502'.8'2 83-14720 This workis subject tocopyright All rights are reserved, whether the whole or partofthe material is concerned, specifically those of translation, reprinting, reuse of illustrations, broadcasting, reproduction by photocopying machine or similar means, and storage in data banks. Under § 54 of the German Copyright Law where copies are made for other than private use, a fee is payable to "Verwertungsgesellschafi Wort", Munich. © by Springer-Verlag Berlin Heidelberg 1984 Originally published by Springer-Verlag Berlin Heidelberg New York Tokyo in 1984 Softcover reprint of the hardcover 18t edition 1984
The use of registered names, trademarks, etc. in this publication does not imply, even in the absence ofa specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. 2153/3130-543210
Preface
The aim of this book is to outline the physics of image formation, electronspecimen interactions and image interpretation in transmission electron microscopy. The book evolved from lectures delivered at the University of Munster and is a revised version of the first part of my earlier book Elektronenmikroskopische Untersuchungs- und Priiparationsmethoden, omitting the part which describes specimen-preparation methods. In the introductory chapter, the different types of electron microscope are compared, the various electron-specimen interactions and their applications are summarized and the most important aspects of high-resolution, analytical and high-voltage electron microscopy are discussed. The optics of electron lenses is discussed in Chapter 2 in order to bring out electron-lens properties that are important for an understanding of the function of an electron microscope. In Chapter 3, the wave optics of electrons and the phase shifts by electrostatic and magnetic fields are introduced; Fresnel electron diffraction is treated using Huygens' principle. The recognition that the Fraunhofer-diffraction p
