Submicrometer-Sized Polystyrene Particles Packing on Silicon Microfabricated Substrate
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0901-Ra22-24-Rb22-24.1
Submicrometer-Sized Polystyrene Particles Packing on Silicon Microfabricated Substrate Manabu Tanaka1, Naonobu Shimamoto2, Takashi Tanii2, Iwao Ohdomari2, and Hiroyuki Nishide1 1 Department of Applied Chemistry, Waseda University, 2 Department of Electrical Engineering and Bioscience, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan ABSTRACT The Packing of submicrometer-sized polystyrene particle within micro-boxes; micrometer-sized squarely recessed pits, was achieved using silicon microfabricated substrates and a simple dipping and pulling-up process. A special phenomenon, cubic packing structures of the particles, was observed when using a micro-box substrate with a few times larger side-length than the particle diameters. Several particle packing structures within different sized micro-boxes were demonstrated, and the relationship between the particle packing structures and micro-box sizes were discussed. INTRODUCTION Recently, there is great interest in arrangement of micro- or nano-meter-sized particles on a substrate because of their potential use in sensors, magnetic storage media, templates for nanostructure formation, and photonic bandgap crystals [1, 2]. Particle arrangements are classified into the following four categories: “colloidal crystal”, “monolayer-particle film”, “particle chain”, and “particle array dot” formation (three-, two-, one-, and zero-dimensional particle arrangements, respectively). Several approaches have been widely studied to arrange micro- or nano-particles on substrates, including ink-jet printing, nanoprobe lithography, micro-contact printing, and a nano-particle arrangement using the patterning substrate as a template [3,]. Among them, the template-assisted procedures using microfabricated patterning substrates are simple and feasible without any special equipment and techniques. In our previous report, polymer nano-particles array dot, zero-dimensional particle arrangement, was realized using silicon microfabricated substrates and a simple dipping and pulling-up procedure [4]. Recently, we applied the same technique to two-dimensional particle arrangement. The two-dimensional monolayer-particle films have been widely reported including its potential application as a mask for lithography [5-8]. In these studies, the monolayer-particle film was formed on the flat surface substrate; therefore, it was difficult to prepare the two-dimensional monolayer-particle film with the desired size. In addition, the structure of the monolayer-particle film is fix only on one specific structure, the spontaneously forming a hexagonal closest packing structure. We used the microfabricated silicon substrates as the templates for the monolayer-particle film to obtain the films with the desired sizes and structures. In this paper, submicrometer-sized polystyrene particle packings within various sized micro-boxes and their packing structures in the micro-boxes are described.
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EXPERIMENTAL DETAILS Preparation of submicrometer-sized polys
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