Tetrahedrally Bonded Amorphous Carbon Films I Basics, Structure and
This book presents the status quo of the structure, preparation, properties and applications of tetrahedrally bonded amorphous carbon (ta-C) films and compares them with related film systems. Tetrahedrally bonded amorphous carbon films (ta-C) combine
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Bernd Schultrich
Tetrahedrally Bonded Amorphous Carbon Films І Basics, Structure and Preparation
Springer Series in Materials Science Volume 263
Series editors Robert Hull, Troy, USA Chennupati Jagadish, Canberra, Australia Yoshiyuki Kawazoe, Sendai, Japan Richard M. Osgood, New York, USA Jürgen Parisi, Oldenburg, Germany Udo W. Pohl, Berlin, Germany Tae-Yeon Seong, Seoul, Republic of Korea (South Korea) Shin-ichi Uchida, Tokyo, Japan Zhiming M. Wang, Chengdu, China
The Springer Series in Materials Science covers the complete spectrum of materials physics, including fundamental principles, physical properties, materials theory and design. Recognizing the increasing importance of materials science in future device technologies, the book titles in this series reflect the state-of-the-art in understanding and controlling the structure and properties of all important classes of materials.
More information about this series at http://www.springer.com/series/856
Bernd Schultrich
Tetrahedrally Bonded Amorphous Carbon Films I Basics, Structure and Preparation
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Bernd Schultrich Fraunhofer Institut für Werkstoff- und Strahltechnik Dresden Germany
ISSN 0933-033X ISSN 2196-2812 (electronic) Springer Series in Materials Science ISBN 978-3-662-55925-3 ISBN 978-3-662-55927-7 (eBook) https://doi.org/10.1007/978-3-662-55927-7 Library of Congress Control Number: 2017958832 © Springer-Verlag GmbH Germany 2018 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. The publisher remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Printed on acid-free paper This Springer imprint is published by Springer Nature The registered company is Springer-Verlag GmbH, DE The registered company address is: Heidelberger Platz 3, 14197 Berlin, Germany
To Helga for your love, patience and assistance
Preface
The technical world consists of contacting bodies, often in relative motion. That means friction and wear. Without friction, the transmission of
