The characterization and preparation of porous low dielectric films using various cyclodextrins as template materials

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E8.10.1

The characterization and preparation of porous low dielectric films using various cyclodextrins as template materials Jin-Heong Yim1, Jung-Bae Kim1, Hyun-Dam Jeong1, Yi-Yeoul Lyu1, Sang Kook Mah1, Jingyu Hyeon-Lee1, Kwang Hee Lee1, Seok Chang1, Lyong Sun Pu1,3 1 Electronic-Materials Lab., Samsung Advanced Institiue of Technology (SAIT), San 14-1, Nongseo-ri, Kiheung-eup, Yongin-shi, Kyungki-do, Korea, 449-712 Y. F. Hu2, J.N. Sun2 and D.W. Gidley2 2 Department of Physics, University of Michigan, Ann Arbor, Michigan 48109 3

Department of Advanced Materials, Sung Kyun Kwan University, 300 Chunchun-dong, Jangan-gu, Suwon, Kyunggi-do 440-746, Korea

ABSTRACT Porous low dielectric films containing nano pores (~20Å) with low dielectric constant (

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