Tip-Based Nanofabrication Fundamentals and Applications
Tip-Based Nanofabrication: Fundamentals and Applications discusses the development of cantilevered nanotips and how they evolved from scanning probe microscopy and are able to manipulate environments at nanoscale on substrates generating diffe
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Ampere A. Tseng Editor
Tip-Based Nanofabrication Fundamentals and Applications
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Editor Ampere A. Tseng School for Engineering of Matter, Transport, and Energy Arizona State University Tempe, AZ 85287-6106, USA [email protected]
ISBN 978-1-4419-9898-9 e-ISBN 978-1-4419-9899-6 DOI 10.1007/978-1-4419-9899-6 Springer New York Dordrecht Heidelberg London Library of Congress Control Number: 2011930809 © Springer Science+Business Media, LLC 2011 All rights reserved. This work may not be translated or copied in whole or in part without the written permission of the publisher (Springer Science+Business Media, LLC, 233 Spring Street, New York, NY 10013, USA), except for brief excerpts in connection with reviews or scholarly analysis. Use in connection with any form of information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed is forbidden. The use in this publication of trade names, trademarks, service marks, and similar terms, even if they are not identified as such, is not to be taken as an expression of opinion as to whether or not they are subject to proprietary rights. Printed on acid-free paper Springer is part of Springer Science+Business Media (www.springer.com)
Preface
Many optoelectronic devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication is critical to the realization of the potential benefits of these devices and systems for society. An important enabling technology in nanofabrication is Tip-Based Nanofabrication (TBN), which makes use of functionalized probes consisting of microscale cantilevers (or tip holders) with attached nanoscale tips. These tip-based probes, evolved in essence from scanning probe microscopy, can perform all types of manufacturing activities, from material removal and material modification to material deposition and material manipulation, all in the nanoscale. Not only can TBN create nanostructures through a conventional top-down approach, it can also build nano-components from the bottom-up. Moreover, this technology can fully integrate with stations in a semiconductor production line, as well as be performed in an ordinary chemistry or physics laboratory. This monograph consists of twelve chapters with subjects ranging from the basic principles of TBN to recent advances in several major TBN technologies related to atomic force microscopy (AFM), scanning tunneling microscopy (STM), and dippen nanolithography (DPN). Two of the twelve chapters are devoted to a single material, one with a specific focus on graphene, and the other with a more general discussion of diamondoid. The former topic is particularly timely given that the 2010 Nobel Prize in Physics was awarded to Geim and Novoselov for their efforts in extracting graphene. The remaining ten chapters address a wide variety of materials, from metals and semiconductors to polymers and ceramics. This monograph is the first book of its kind dedicated sol
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