Tuning Electrode Properties and Surface Contacts for Uniform Deposits Produced by Atmospheric Plasma Dielectric Barrier
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MRS Advances © 2018 Materials Research Society DOI: 10.1557/adv.2018.42
Tuning Electrode Properties and Surface Contacts for Uniform Deposits Produced by Atmospheric Plasma Dielectric Barrier Discharge Reactors Chi-Chin Wu1, Timothy A. Jenkins1, James K. Hirvonen2, Michael Leadore1 1
Energetic Materials Science Branch, Lethality Division, Weapons and Materials Research Directorate, US Army Research Laboratory, Aberdeen Proving Ground, Maryland 21005, USA
2 Coatings, Corrosion and Engineered Polymers Branch, Materials and Manufacturing Science Division, Weapons and Materials Research Directorate, US Army Research Laboratory, Aberdeen Proving Ground, Maryland 21005, USA
ABSTRACT
An investigation of the effect of experimental parameters on the temperature and uniformity of material deposition by atmospheric pressure dielectric barrier discharge (DBD) planar plasma reactors was conducted. The apparatus consisted of a pulsed AC high voltage power source with various electrode materials (aluminum, copper wire mesh, and aluminum/copper wire mesh) operating under a range of load resistances. Possible effects of non-ideal interfacial conditions for the contact surface between the electrode and the substrate were also studied with various modified surface thermal conditions. It was found that a hybrid electrode design with a fine copper (Cu) wire mesh attached to an aluminum plate of approximately 3 mm thickness produced the most visually uniform deposit, presumably as a result of both the superior conductivity provided by the Al metal plate and the stable plasma resulting from the relatively low breakdown voltage by using helium (He) as the dilution gas. Although the experimental conditions of plasma-enhanced chemical vapor deposition (PECVD) are often specific to particular systems and applications, this work provides insights on technical details which can be applied to various plasma DBD reactors.
INTRODUCTION Dielectric barrier discharge (DBD) operating at atmospheric pressure conditions have been widely employed for many applications in plasma-assisted chemical synthesis and surface functionalization that would be otherwise difficult or impossible to realize via conventional methods under normal conditions [e.g.,1-6]. A suitable design of the electrodes to ensure a stable and uniform plasma glow is important [2,7]. Various studies of electrode geometry [2,8], dimension [9], movement [10] and material type [11] using DBD plasma configurations have been reported. In particular, Okazaki et al.’s work [11] suggested that metal wire mesh electrodes generate stable and uniform plasmas regardless of the type of carrier gas. Nevertheless, cross comparisons of the combined effects of electrode material, geometry and contact surfaces on plasma generation, and the effects on plasma temperature and uniformity of the resultant
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