Ultra-precision machining of a large amplitude umbrella surface based on slow tool servo
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International Journal of Precision Engineering and Manufacturing https://doi.org/10.1007/s12541-020-00401-0
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Ultra‑precision machining of a large amplitude umbrella surface based on slow tool servo Peixing Ning1 · Ji Zhao1,2 · Shijun Ji1 · Jingjin Li1 · Handa Dai1 Received: 5 January 2020 / Revised: 11 June 2020 / Accepted: 2 August 2020 © Korean Society for Precision Engineering 2020
Abstract Due to its excellent optical performance and system integration property, micro-nano structure function surface has been widely used in optical apparatus and energy collection equipment. But using traditional processing method can’t obtain a mirror-like surface with high form accuracy and low roughness for sake of its complex micro-nano structure. In this paper, a large amplitude umbrella surface is special designed and single point diamond turning (SPDT) technology based on slow tool servo (STS) is used for umbrella surface machining. The tool path generation, tool radius compensation and tool geometry optimization are detailed for fabricating the desired surface. A new method combined with constant angle and analytical mathematical optimization is proposed for tool path optimization. A large amplitude umbrella surface with the maximum amplitude 0.2 mm and period 8 per cycle is designed, and the machining experiment is carried out on Nanoform 250 ultra-precision machine tool. From the form accuracy 1 μm in surface residual error and 279.12 nm in RMS and the surface roughness 230.10 nm in Ra for the machined surface, it can be seen that a large amplitude umbrella surface is easily fabricated by SPDT under STS controlling. Keywords Large amplitude umbrella surface · Slow tool servo (STS) · Analytical optimization method · Ultra-precision machining · Single point diamond turning (SPDT)
1 Introduction Micro-nano structure functional surface has shown many excellent properties in optics, biology, etc. It finds wide applications in various fields [1]. Compared with conventional surfaces, the geometry of freeform optics is more complex. There is usually no axis of rotation and symmetry. * Ji Zhao [email protected] * Shijun Ji [email protected] Peixing Ning [email protected] Jingjin Li [email protected] Handa Dai [email protected] 1
School of Mechanical and Aerospace Engineering, Jilin University, Changchun, China
School of Mechanical Engineering and Automation, Northeastern University, Shenyang, China
2
To ensure the function of the micro-nano structure functional surface, sub-micrometer form accuracy and nanometer surface topography is required [2, 3]. Micro-nano structure function surface can be manufactured by a lot of methods. With the technical evolution in advanced manufacturing, ultra-precision machining technology has become the main processing method for surface manufacturing of micro-nano structures with high precision [4–6]. Presently, SPDT with fast tool servo (FTS) and slow tool servo (STS) provides a major role in generating optics surface without the need for any subsequent pro
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