Ultraprecision Machining
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Ultraprecision Machining Ekkard Brinksmeier University of Bremen, Leibniz-IWT, Bremen, Germany
Synonyms High precision machining; Precision machining; Ultraprecision finishing
Definition Depending on the context, the term “ultraprecision machining” is used with three slightly different connotations in the engineering community: 1. In a production engineering context, “ultraprecision machining” is usually referred to a mechanical machining process which is applied to macroscopic workpieces and whose accuracy has been driven to its ultimate technological limits. 2. In a research context, “ultraprecision machining” is usually referred to a machining process which is applied to macroscopic workpieces and whose accuracy has been driven to its ultimate technological limits, irrespective of
the nature of the process (mechanical, chemical, or physical). 3. In an academic context, “ultraprecision machining” is usually referred to a machining process whose accuracy has been driven to its ultimate technological limits, irrespective of the nature of the process and the size of the workpiece (macro-, micro-, or nanoscopic). In its definition (1), “ultraprecision machining” comprises mainly of diamond turning and milling (diamond machining), ultraprecision grinding (ultraprecision grinding), and mechanical polishing. Definition (2) includes physical and chemical machining operations like ion beam polishing and reactive-ion etching which are under development and/or are applied in research laboratories for the finishing of precision optical elements. From a general point of view, focusing on the aspect of precision, definition (3) also includes the machining of micro- and even nanoscopic parts, the common denominator being the small amount of material removed in one machining step and the dimensional accuracy reached by the process. Since ultraprecision machining is a rapidly growing field, it must be emphasized that the definitions given above are reflecting today’s understanding of the term which is likely to change in the future (Brinksmeier and Preuß 2012). This likewise applies to the core element of “ultraprecision machining,” that is, the notion of “precision” itself. According to Taniguchi
# CIRP 2018 The International Academy for Production Engineering et al. (eds.), CIRP Encyclopedia of Production Engineering, https://doi.org/10.1007/978-3-642-35950-7_6403-4
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Ultraprecision Machining
(1983), “precision of machining” can only be assessed from an evolutionary perspective as “processes/machines by which the highest possible dimensional accuracy is or has been achieved at a given point in time” (cf. Fig. 1). Ultraprecision machining today is associated with a machining accuracy between 0.1 and 1 mm, depending on size and shape of the workpiece, and an achieved surface roughness between 1 and 10 nm Sa, depending on material properties and machining conditions. The remainder of this article deals with ultraprecision machining in its common connotation given by definition (1).
Theory and Application History The history of ult
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