Advanced Interactive Personal Computer-Based Process Control Systems for Oxide MOCVD Systems.
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Mat. Res. Soc. Symp. Proc. Vol. 415 ©1996 Materials Research Society
EXPERIMENTAL:
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Data Process Corn puter for In-situ Monitoring & Feedback Control
Electronic Instrumentation
Main Control
Semiconductor Growth System
Figure 1. General hardware configuration diagram.
The overall hardware configuration for both systems is shown in Fig. 1. The most frequently used hardware configuration is an ISA bus based PC system. The interface boards consist of Analog Input Board (ND) with signal conditioning circuits, Analog Output boards (D/A) with digital I/O lines. The digital lines are buffered by solid state relay modules. This configuration has proven to be the most cost effective technique to meet all the requirements of speed and accuracy for CVD process control. The interface between the computer and system hardware can be in many formats. The DDE servers are -file Edit
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Figure 3. (a) Typical run layer data input screen and (b) typical trend analysis screen. used to transfer information between hardware I/O devices and Windows' software. Input/Output Hardware include PC mounted Analog Input Boards, Analog Output Boards, Digital Input Boards, Digital Output Board and all necessary conditioning circuits. A PLC is also a possible choice as the I/O device replacing internal cards. For networking, any common Ethernet board with cables is acceptable. The overall system hardware has been incorporated in and supported by a 486-66MHZ PC with a Super VGA monitor, 16 MB RAM, 520 MB Hard Disk, keyboard and mouse. WonderwareTu is an advanced process monitoring and control software for Microsoft Windows, which has a great flexibility of user interface design capabilities as exemplifie
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