An Autonomous and Intelligent System Using Mobile-Agent Software to Model the Calculation Processes of Film Deposition S
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1024-A06-05
An Autonomous and Intelligent System Using Mobile-Agent Software to Model the Calculation Processes of Film Deposition Simulators Takahiro Takahashi1, Noriyuki Fukui1, Masamoto Arakawa2, Kimito Funatsu2, and Yoshinori Ema1 1 Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, 4328561, Japan 2 Department of Chemical System Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 1138656, Japan ABSTRACT We developed an autonomous modeling system for the calculation processes of the simulator for film deposition processes in order to decrease the calculation cost for reproducing experimental results. Replacing the simulator with the mathematical models proposed by the modeling system decreased huge calculation cost of the simulator. The system consists of one mobile agent and three platforms for the agent. The agent autonomously moved in the computernetworks and operated the process simulator in the platform in order to make training data needed for modeling and then operated the generalized modeling software in the platform using the training data and finally the agent created the models. The models showed both good reproducibility and predictability with the calculated results of the simulator. INTRODUCTION Process simulators are helpful for developing film deposition processes, such as Chemical Vapor Deposition (CVD) processes. However, the huge calculation costs of the simulators limit their applications to the processes. One effective way to decrease the calculation costs is to model the calculation processes of the simulators, that is, by creating mathematical models of the correlation between calculation conditions and calculated results of the simulators and replacing the simulators with the models. However, it is very difficult for researchers to make appropriate models, because modeling includes a lot of difficult procedures, such as making high-quality training data and operating advanced modeling software. Therefore, in this study we developed an autonomous modeling system for the calculation processes of the simulators using mobile-agent technology [1,2] and investigated the quality of the proposed models. Since the mobile agent acts autonomously for a user, the user can produce good models without being familiar with the complicated systems. THEORETICAL DETAILS We adopted the film deposition simulator based on the Simplified Monte Carlo (SMC) method as an example of a process simulator [3,4]. The simulator reproduces the cross-sections of deposited films on the substrates with nanometer- or micrometer-sized trenches in the Knudsen diffusion regime. In this study, several deposition species, which have different values of sticking coefficient and different flux ratios, collide and then reflect from or stick to the substrates, resulting in film formation. In this study, the number of species was limited to no more than four. The cross-section shapes of the trench were trapezoidal.
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