Analytical modeling to estimate the sensitivity of MEMS technology-based piezoresistive pressure sensor
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Analytical modeling to estimate the sensitivity of MEMS technology‑based piezoresistive pressure sensor Vinod Belwanshi1,2 Received: 13 February 2020 / Accepted: 16 September 2020 © Springer Science+Business Media, LLC, part of Springer Nature 2020
Abstract Design and modeling of microelectromechanical system (MEMS)-based piezoresistive pressure sensor are main requirements to fabricate application-oriented pressure sensor devices for the industry, i.e., nuclear power plants, aerospace and avionics, oil and gas, Internet of Things, wearable electronics and consumer electronics. In this research work, analytical modeling is presented to estimate the overall sensitivity of the MEMS technology-based piezoresistive pressure sensor. The sensitivity of a piezoresistive pressure sensor is estimated using the thin plate theory and the theory of piezoresistivity in silicon. The mechanical responses of a thin plate in terms of deflection and induced stresses are presented and discussed. The effects of geometrical parameters on deflection and induced stresses are analyzed using a ratio of half-edge length with the thickness ( a∕h ) and a ratio of diaphragm edges ( a∕b ). These ratio parameters are responsible for the sensitivity of the piezoresistive pressure sensor. Moreover, a comparative assessment is presented for the current model with a model available in the literature. Further, calculations of average stresses are carried out for the piezoresistor geometry of a small rectangular area. Thereafter, a quantitative variation in the calculated sensitivity is presented based on calculation with maximum stress and average stress. The calculated difference in overall sensitivity is found to be 3%. However, a significant reduction in average stresses as compared to maximum induced stresses is obtained as 28% and 36% change for stress X and stress Y, respectively. Keywords Analytical modeling · Piezoresistive pressure sensor · Thin plate · Piezoresistivity
1 Introduction A pressure sensor is one of the most utilized sensing devices in industries ranging from the biomedical, nuclear power plant, oil and gas, automobile and avionic applications [1–5]. The microelectromechanical system (MEMS) plays an essential role in the fabrication of microsensors with high sensitivity as compared to its conventional counterpart [1]. Generally, a pressure sensor consists of thin microstructures (cantilever and diaphragm) as a primary sensing element, a secondary sensing element, which is based on the transduction mechanism (i.e., piezoresistors for piezoresistive technique and parallel plates or comb drive for capacitive technique), and a reference cavity to decide the type of pressure
* Vinod Belwanshi [email protected] 1
Indian Institute of Technology Bombay, Mumbai 400076, India
University of Glasgow, Glasgow G12 8QQ, Scotland, UK
2
measurement (i.e., absolute, atmospheric or differential pressure). The geometrical optimization of the thin diaphragm is an important task that forced the overall sensitivity of the pressu
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