Novel MEMS Piezoresistive Sensor with Hair-Pin Structure to Enhance Tensile and Compressive Sensitivity and Correct Non-
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Novel MEMS Piezoresistive Sensor with Hair-Pin Structure to Enhance Tensile and Compressive Sensitivity and Correct Non-Linearity Sumit Kumar Jindal 1 & Ritobrita De 1 & Ajay Kumar 2 & Sanjeev Kumar Raghuwanshi 3 Received: 11 February 2020 / Accepted: 7 July 2020 # Springer Science+Business Media, LLC, part of Springer Nature 2020
Abstract This work focuses on enhancing the sensitivity and reducing the wheatstone bridge non-linearity of the current designs of MicroElectro-Mechanical systems pressure sensor. Conventionally there are four piezoresistors on the four edges of a square diaphragm. These four peizoreistors give rise to a change in resistance with input stress which is converted to voltage using a wheatstone bridge so that it can be measured. In this renewed proposed design, there are a total of eight sensors on the diaphragm; four dedicated to the compressive and tensile stress on the XX – plane and the other four for the YY – plane. Compressive and tensile forces have similar magnitude but act in opposite directions which isn’t considered in the conventional designs, leading to non-linearity. Thus the non-linearity due to the sign difference in compressive and tensile forces is accounted for by calculating them separately and doubling the sensitivity. Each of these eight sensors include two piezoresistors; one attached to the diaphragm and the other outside forming a hairpin structure. Instead of using the wheatstone bridge for measuring the voltage, we make use of operational amplifiers. Thus removing the wheatstone bridge non–linearity. Keywords MEMS . Piezoresistive sensor . Hairpin structure . Operational amplifiers
1 Introduction Pressure sensors are widely used in various applications and are a building block of any control system. They can be of various types involving different working principles like, capacitive, electromagnetic, piezoelectric, strain-gauge and optical [16]. Traditionally pressure sensors operated by converting the mechanical motion caused by the pressure of the surrounding into the motion of a dial which indicates the applied pressure. Examples of such pressure detecting devices are; manometers, bourdon tubes, diaphragms, and bellows. Capacitive pressure sensors typically have a thin diaphragm acting as the movable plate with respect to the second fixed plate of the parallel plate Responsible Editor: B. C. Kim * Sumit Kumar Jindal [email protected] 1
School of Electronics Engineering, Vellore Institute of Technology, Vellore, Tamil Nadu, India
2
Department of Electronics and Communication Engineering, National Institute of Technology, Jamshedpur, Jharkhand, India
3
Department of Electronics Engineering, Indian Institute of Technology (Indian School of Mines), Dhanbad, Jharkhand, India
capacitor [8]. Some recently developed capacitor pressure sensors use two movable diaphragms as well for improved signal acquisition [19]. The applied pressure on the diaphragm causes change in the capacitance between the two plates of the parallel plate capacitor giving rise to a vo
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