Case Studies in Micromechatronics From Systems to Processes
The book “Case Studies in Micromechatronics – From Systems to Processes” describes prominent example applications of micromechatronic systems along with their enabling fabrication technologies. The chosen examples represent five main fields of application
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Case Studies in Micromechatronics From Systems to Processes
Case Studies in Micromechatronics
Stephanus Büttgenbach · Iordania Constantinou · Andreas Dietzel · Monika Leester-Schädel
Case Studies in Micromechatronics From Systems to Processes
Stephanus Büttgenbach Technische Universität Braunschweig Braunschweig, Germany
Iordania Constantinou Technische Universität Braunschweig Braunschweig, Germany
Andreas Dietzel Technische Universität Braunschweig Braunschweig, Germany
Monika Leester-Schädel Technische Universität Braunschweig Braunschweig, Germany
ISBN 978-3-662-61319-1 ISBN 978-3-662-61320-7 (eBook) https://doi.org/10.1007/978-3-662-61320-7 © Springer-Verlag GmbH Germany, part of Springer Nature 2020 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, expressed or implied, with respect to the material contained herein or for any errors or omissions that may have been made. The publisher remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Responsible Editor: Michael Kottusch This Springer imprint is published by the registered company Springer-Verlag GmbH, DE part of Springer Nature. The registered company address is: Heidelberger Platz 3, 14197 Berlin, Germany
Preface
This book was developed on the basis of the material that was made available to the students at the lectures Principles of Microtechnology and Applications of Microtechnology at Technische Universität Braunschweig, which has been supplemented and adapted over the years. These courses were initiated by Stephanus Büttgenbach and later continued by Andreas Dietzel and Monika Leester-Schädel with some adjustments. Additionally, some material from courses on actuators, Lab-on-Chip and biosensors has been included in this book. Since the emergence of the field of micromechatronics and the entry of this subject into academic teaching, numerous textbooks have been written focusing on microfabrication techniques. Some books on microsystem applications that pick out certain sub-areas such as sensors, micro-robotics or Lab-on-Chip and treat them in depth are also available. I
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